@misc{PfluegerKlineFernandezHerreroetal., author = {Mika Pfl{\"u}ger and R Joseph Kline and Anal{\´i}a Fern{\´a}ndez Herrero and Martin Hammerschmidt and Victor Soltwisch and Michael Krumrey}, title = {Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering [Source Code]}, doi = {10.24433/CO.0953516.v2}, language = {en} }