@article{AndrleHoenickeGwaltetal.2021, author = {Anna Andrle and Philipp H{\"o}nicke and Grzegorz Gwalt and Philipp-Immanuel Schneider and Yves Kayser and Frank Siewert and Victor Soltwisch}, title = {GIXRF and machine learning as metrological tools for shape and element sensitive reconstructions of periodic nanostructures}, journal = {Proc. SPIE}, volume = {11611}, pages = {116110R}, doi = {10.1117/12.2586082}, year = {2021}, }