@article{ManleyWaldeHagedornetal.2020, author = {Phillip Manley and Sebastian Walde and Sylvia Hagedorn and Martin Hammerschmidt and Sven Burger and Christiane Becker}, title = {Nanopatterned Sapphire Substrates in Deep-UV LEDs: Is there an Optical Benefit?}, journal = {Opt. Express}, volume = {28}, pages = {3619}, doi = {10.1364/OE.379438}, year = {2020}, }