@article{HammerschmidtWeiserSantiagoetal.2017, author = {Martin Hammerschmidt and Martin Weiser and Xavier Garcia Santiago and Lin Zschiedrich and Bernd Bodermann and Sven Burger}, title = {Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion}, journal = {Proc. SPIE}, volume = {10330}, pages = {1033004}, doi = {10.1117/12.2270596}, arxiv = {http://arxiv.org/abs/1707.08467}, year = {2017}, language = {en} }