@article{ShinanoInuiFukagawaetal.2013, author = {Yuji Shinano and Nobuo Inui and Youzou Fukagawa and Noburu Takakura}, title = {Optimizing Movement Sequences for Step-and-Scan Lithography Equipment}, journal = {Journal of Advanced Mechanical Design, Systems, and Manufacturing}, volume = {7}, number = {4}, pages = {608 -- 618}, doi = {10.1299/jamdsm.7.608}, year = {2013}, }