@article{TyminskiPomplunZschiedrichetal.2013, author = {Jacek Tyminski and Jan Pomplun and Lin Zschiedrich and Donis Flagello and Tomiyuki Matsuyama}, title = {Topographic mask modeling with reduced basis finite element method}, journal = {Proc. SPIE}, volume = {8683}, pages = {86831C}, doi = {10.1117/12.2011613}, year = {2013}, }