@article{BurgerZschiedrichPomplunetal.2013, author = {Sven Burger and Lin Zschiedrich and Jan Pomplun and Frank Schmidt and Bernd Bodermann}, title = {Fast simulation method for parameter reconstruction in optical metrology}, journal = {Proc. SPIE}, volume = {8681}, pages = {868119}, doi = {10.1117/12.2011154}, year = {2013}, }