@inproceedings{ZschiedrichSchmidt2008, author = {Lin Zschiedrich and Frank Schmidt}, title = {Finite element simulation of light propagation in non-periodic mask patterns}, booktitle = {Photomask and Next-Generation Lithography Mask Technology XV}, editor = {Toshiyuki Horiuchi}, volume = {7028}, url = {http://arxiv.org/pdf/0804.2587v1}, year = {2008}, }