@inproceedings{ZschiedrichBurgerSchaedleetal.2008, author = {Lin Zschiedrich and Sven Burger and Achim Sch{\"a}dle and Frank Schmidt}, title = {A rigorous finite-element domain decomposition method for electromagnetic near field simulations}, booktitle = {Optical Microlithography XXI}, editor = {Harry Levinson and Mircea Dusa}, volume = {6924}, doi = {10.1117/12.771989}, year = {2008}, }