@inproceedings{TyminskiPopescuBurgeretal.2012, author = {Jacek Tyminski and Raluca Popescu and Sven Burger and Jan Pomplun and Lin Zschiedrich and Tomoyuki Matsuyama and Tomoya Noda}, title = {Finite element models of lithographic mask topography}, booktitle = {Proc. SPIE}, editor = {W. Conley}, volume = {8326}, pages = {83261B}, doi = {10.1117/12.916957}, year = {2012}, }