@inproceedings{PomplunBurgerZschiedrichetal.2011, author = {Jan Pomplun and Sven Burger and Lin Zschiedrich and Frank Schmidt}, title = {Reduced basis method for real-time inverse scatterometry}, booktitle = {Modelling Aspects in Optical Metrology III}, volume = {8083}, pages = {808308}, doi = {10.1117/12.889892}, year = {2011}, }