@inproceedings{PomplunBurgerSchmidtetal.2006, author = {Jan Pomplun and Sven Burger and Frank Schmidt and Lin Zschiedrich and Frank Scholze}, title = {Rigorous FEM-Simulation of EUV-Masks: Influence of shape and material parameters}, booktitle = {Photomask Technology}, editor = {P. Martin and R. Naber}, volume = {6349}, pages = {63493D}, doi = {10.1117/12.686828}, year = {2006}, }