@inproceedings{BurgerZschiedrichPomplunetal.2011, author = {Sven Burger and Lin Zschiedrich and Jan Pomplun and Frank Schmidt and Akiko Kato and Christian Laubis and Frank Scholze}, title = {Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations}, booktitle = {Photomask Technology 2011}, volume = {8166}, pages = {81661Q}, doi = {10.1117/12.896839}, year = {2011}, }