@inproceedings{BurgerZschiedrichSchmidtetal.2008, author = {Sven Burger and Lin Zschiedrich and Frank Schmidt and Peter Evanschitzky and Andreas Erdmann}, title = {Benchmark of rigorous methods for electromagnetic field simulation}, booktitle = {Photomask Technology}, editor = {H. Kawahira and L. S. Zurbrick}, volume = {7122}, pages = {71221}, doi = {10.1117/12.801248}, url = {http://dx.doi.org/10.1117/12.801248}, year = {2008}, }