@inproceedings{BurgerZschiedrichSchmidtetal.2007, author = {Sven Burger and Lin Zschiedrich and Frank Schmidt and Roderick K{\"o}hle and Thomas Henkel and Bernd K{\"u}chler and Christoph N{\"o}lscher}, title = {3D simulations of electromagnetic fields in nanostructures using the time-harmonic finite-element method}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Harald Bosse}, volume = {6617}, pages = {66170V}, doi = {10.1117/12.726236}, year = {2007}, }