@inproceedings{BurgerZschiedrichSchmidt2010, author = {Sven Burger and Lin Zschiedrich and Frank Schmidt}, title = {3D FEM Simulations of High-Q Resonances in Photonic Crystal Microcavities}, booktitle = {Integrated Photonics Research, Silicon and Nanophotonics}, pages = {IWB7}, doi = {10.1364/IPRSN.2010.IWB7}, year = {2010}, }