@misc{LeiblSytenkoDemirciogluetal., author = {Livius Leibl and Viktoriia Sytenko and Rana Demircioglu and Leonid Beliaev and Felix Binkowski}, title = {Source code and simulation results: AAA rational approximation for scatterometry of nanoscale gratings}, journal = {Zenodo}, doi = {10.5281/zenodo.21887001}, language = {en} }