@article{LeiblSytenkoDemirciogluetal.2026,
  author    = {Livius Leibl and Viktoriia Sytenko and Rana Demircioglu and Leonid Beliaev and Felix Binkowski},
  title     = {AAA rational approximation for scatterometry of nanoscale gratings},
  journal   = {ArXiV},
  pages     = {arXiv:2608.2818},
  doi       = {10.48550/arXiv.2608.28185},
  arxiv     = {http://arxiv.org/abs/2608.28185},
  year      = {2026},
  language  = {en}
}