@article{SchaibleOezdemirDebusetal.2026,
  author    = {Jonas Schaible and Asena Karolin {\"O}zdemir and Charlotte Debus and Sven Burger and Achim Streit and Christiane Becker and Klaus J{\"a}ger and Markus G{\"o}tz},
  title     = {Inverse Design of Optical Multilayer Thin Films using Robust Masked Diffusion Models},
  journal   = {ArXiV},
  pages     = {arXiv:2604.01106},
  doi       = {10.48550/arXiv.2604.01106},
  arxiv     = {http://arxiv.org/abs/2604.01106},
  year      = {2026},
  note        = {under review}
  language  = {en}
}