@article{KruegerDopslaffManleyetal.2026, author = {Jan Kr{\"u}ger and Sven Dopslaff and Phillip Manley and Detlef Bergmann and Rainer K{\"o}ning and Gaoliang Dai and Kai Hahm and Philipp-Immanuel Schneider and Martin Hammerschmidt and Lin Zschiedrich and Harald Bosse and Bernd Bodermann}, title = {Photomask linewidth measurement comparison including an improved model-based through-focus measurement approach}, journal = {Meas. Sci. Technol.}, volume = {37}, pages = {095004}, doi = {10.1088/1361-6501/ae44bb}, year = {2026}, language = {en} }