TY - JOUR A1 - Mukherjee, Deshabrato A1 - Burger, Sven A1 - Siefke, Thomas A1 - Gour, Jeetendra A1 - Bodermann, Bernd A1 - Petrik, Peter T1 - Spectroscopic Ellipsometry of Plasmonic Gratings─Ideal Parameters for Sensing and Subpicometer Measurement Uncertainty T2 - ACS Omega Y1 - 2025 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/9995 VL - 10 IS - 14 SP - 14466 EP - 14473 ER -