@article{MukherjeeBurgerSiefkeetal.2025, author = {Deshabrato Mukherjee and Sven Burger and Thomas Siefke and Jeetendra Gour and Bernd Bodermann and Peter Petrik}, title = {Spectroscopic Ellipsometry of Plasmonic Gratings─Ideal Parameters for Sensing and Subpicometer Measurement Uncertainty}, journal = {ACS Omega}, volume = {10}, number = {14}, pages = {14466 -- 14473}, doi = {10.1021/acsomega.5c00951}, year = {2025}, language = {en} }