TY  - JOUR
A1  - Andrle, Anna
A1  - Hönicke, Philipp
A1  - Schneider, Philipp-Immanuel
A1  - Kayser, Yves
A1  - Hammerschmidt, Martin
A1  - Burger, Sven
A1  - Scholze, Frank
A1  - Beckhoff, Burkhard
A1  - Soltwisch, Victor
T1  - Grazing incidence x-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction
T2  - Proc. SPIE
Y1  - 2019
UR  - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/7387
VL  - 11057
SP  - 110570M
ER  -