@article{AndrleHoenickeSchneideretal.2019, author = {Anna Andrle and Philipp H{\"o}nicke and Philipp-Immanuel Schneider and Yves Kayser and Martin Hammerschmidt and Sven Burger and Frank Scholze and Burkhard Beckhoff and Victor Soltwisch}, title = {Grazing incidence x-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction}, journal = {Proc. SPIE}, volume = {11057}, pages = {110570M}, doi = {10.1117/12.2526082}, year = {2019}, }