TY - JOUR A1 - Hammerschmidt, Martin A1 - Weiser, Martin A1 - Santiago, Xavier Garcia A1 - Zschiedrich, Lin A1 - Bodermann, Bernd A1 - Burger, Sven T1 - Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion T2 - Proc. SPIE Y1 - 2017 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/6441 VL - 10330 SP - 1033004 ER -