@article{HammerschmidtWeiserSantiagoetal.2017, author = {Martin Hammerschmidt and Martin Weiser and Xavier Garcia Santiago and Lin Zschiedrich and Bernd Bodermann and Sven Burger}, title = {Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion}, journal = {Proc. SPIE}, volume = {10330}, pages = {1033004}, doi = {10.1117/12.2270596}, year = {2017}, }