TY - JOUR A1 - Soltwisch, Victor A1 - Burger, Sven A1 - Scholze, Frank T1 - Scatterometry sensitivity analysis for conical diffraction versus in-plane diffraction geometry with respect to the side wall angle T2 - Proc. SPIE Y1 - 2013 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/2813 VL - 8789 SP - 878905 ER -