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Optimization of local backside released micro-ring resonators for sensing applications using silicon photonic integrated circuits in a SOI technology

  • Photonic micro-ring resonators (MRR) are widely studied for their high sensitivity across applications like environmental monitoring, healthcare, and chemical analysis. Their evanescent field sensing requires partially unembedded waveguides compatible with CMOS processing. Our approach uses local backside etching with an additional buried oxide (BOX) etch to release waveguides while preserving the back-end of line (BEOL) structure, enabling spatial separation of the sensing area and electronics. The BOX etch critically affects sensor performance, as waveguide surface roughness can alter MRR properties and coupling. We analyzed MRR design variations, comparing wet and dry etching techniques for their effects on optical performance across rib and strip waveguides in quasi-TE and quasi-TM modes. Wafer-level measurements show that backside-released MRR achieve high extinction ratios with slightly reduced quality factors, advancing high-sensitivity photonic sensors.

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URN:urn:nbn:de:kobv:526-opus4-20449
Publisher DOI:https://doi.org/10.1117/12.3056481
Author:Tabea Fünning, Anna Peczek, Aleksandra Kroh, Christian Mai, Martin Paul, Florian Thomsen, Robert TannenbergGND, Christoph Schumann, Michael G. WellerORCiD, Andreas MaiORCiD, Patrick SteglichORCiD
Parent Title (English):Proceedings of SPIE : Optical Sensors 2025
Document Type:Conference Proceeding
Language:English
Year of Publication:2025
Volume:13527
Article Number:135270U
Publisher:SPIE
Faculties an central facilities:Fachbereich Ingenieur- und Naturwissenschaften
Editor:Francesco BaldiniORCiD, Jiri Homola, Robert A. Lieberman
Publishing Institution:Technische Hochschule Wildau
Tag:local backside etching (LBE); micro-ring resonator (MRR); photonic sensor; silicon-on-insulator (SOI)
Source:Tabea Fünning, Anna Peczek, Aleksandra Kroh, Christian Mai, Martin Paul, Florian Thomsen, Robert Tannenberg, Christoph Schumann, Michael G. Weller, Andreas Mai, and Patrick Steglich "Optimization of local backside released micro-ring resonators for sensing applications using silicon photonic integrated circuits in a SOI technology", Proc. SPIE 13527, Optical Sensors 2025, 135270U (23 May 2025); https://doi.org/10.1117/12.3056481
Dewey Decimal Classification:5 Naturwissenschaften und Mathematik / 53 Physik / 535 Licht, Infrarot- und Ultraviolettphänomene
6 Technik, Medizin, angewandte Wissenschaften / 62 Ingenieurwissenschaften / 621 Angewandte Physik
Licence (German):Das Dokument ist urheberrechtlich geschützt.
Release Date:2025/06/02
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