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Silicon-on-Insulator Slot Waveguides: Theory and Applications in Electro-Optics and Optical Sensing

  • This chapter deals with the basic concept of silicon-on-insulator (SOI) slot waveguides,including slot waveguide theory, fabrication steps, and applications. First, in the theorysection, a modal field expression and the characteristic equation is derived, which is alsovalid for higher-order modes. SOI slot waveguide structures are simulated and character-istic values like the effective refractive indices and the field confinement factors are deter-mined. The fabrication section describes typical SOI fabrication steps and the limits ofcurrent fabrication techniques. Additionally, developments regarding loss reduction inSOI slot waveguides are given from the fabrication point of view. This is followed by thetheory and practice of slot waveguide based electro-optical modulators. Here, the SOI slotwaveguide is embedded in an organic nonlinear optical material in order to achieverecord-low voltage-length products. In the field of optical sensors, it is shown that slotwaveguides enable remarkable waveguide sensitivity for both refractive index sensingand surface sensing.

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Metadaten
Author:Patrick SteglichORCiD
URN:urn:nbn:de:kobv:526-opus4-10563
DOI (Version of Record):https://doi.org/10.5772/intechopen.75539
ISBN:978-1-78923-493-0
Parent Title (English):Emerging Waveguide Technology
Publisher:IntechOpen
Editor:Kok Yeow You
Document Type:Part of a Book
Language:English
Year of Publication:2018
Publishing Institution:Technische Hochschule Wildau
Release Date:2018/10/09
First Page:187
Last Page:210
Source:Steglich, P. (2018). Silicon-on-Insulator Slot Waveguides: Theory and Applications in Electro-Optics and Optical Sensing In Emerging Waveguide Technology. (pp. 187-210). London: IntechOpen.
Faculties an central facilities:Fachbereich Ingenieur- und Naturwissenschaften
Dewey Decimal Classification:6 Technik, Medizin, angewandte Wissenschaften / 62 Ingenieurwissenschaften / 620 Ingenieurwissenschaften und zugeordnete Tätigkeiten
Licence (German):Creative Commons - CC BY 3.0 - Namensnennung 3.0 Unported
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