MetadatenAuthor: | Oksana Fursenko, Mindaugas Lukosius, Joachim Bauer, Claus VillringerORCiD, Helge Lux, Florian Bärwolf, Marco LiskerORCiD, Andreas MaiORCiD |
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URN: | urn:nbn:de:kobv:526-opus4-16083 |
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DOI (Version of Record): | https://doi.org/10.1116/1.5122792 |
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Parent Title (English): | Journal of Vacuum Science & Technology B |
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Publisher: | American Vacuum Society (AVS) |
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Document Type: | Article |
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Language: | English |
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Year of Publication: | 2019 |
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Year of first Publication: | 2019 |
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Publishing Institution: | Technische Hochschule Wildau |
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Release Date: | 2022/05/11 |
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Volume: | 37 |
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Issue: | 6 |
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Article Number: | 062927 |
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Source: | Oksana Fursenko, Mindaugas Lukosius, Joachim Bauer, Claus Villringer, Helge Lux, Florian Bärwolf, Marco Lisker, and Andreas Mai , "Diagnostic of graphene on Ge(100)/Si(100) in a 200 mm wafer Si technology environment by spectroscopic ellipsometry/reflectometry", Journal of Vacuum Science & Technology B 37, 062927 (2019) https://doi.org/10.1116/1.5122792 |
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Copyright: | This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in "Oksana Fursenko, Mindaugas Lukosius, Joachim Bauer, Claus Villringer, Helge Lux, Florian Bärwolf, Marco Lisker, and Andreas Mai , "Diagnostic of graphene on Ge(100)/Si(100) in a 200 mm wafer Si technology environment by spectroscopic ellipsometry/reflectometry", Journal of Vacuum Science & Technology B 37, 062927 (2019)" and may be found at https://doi.org/10.1116/1.5122792. |
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Faculties an central facilities: | Fachbereich Ingenieur- und Naturwissenschaften |
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Dewey Decimal Classification: | 6 Technik, Medizin, angewandte Wissenschaften / 62 Ingenieurwissenschaften / 620 Ingenieurwissenschaften und zugeordnete Tätigkeiten |
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Licence (German): | Das Dokument ist urheberrechtlich geschützt |
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