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Partially slotted silicon ring resonator covered with electro-optical polymer

  • In this work, we present for the first time a partially slotted silicon ring resonator (PSRR) covered with an electro-optical polymer (Poly[(methyl methacrylate)-co-(Disperse Red 1 acrylate)]). The PSRR takes advantage of both a highly efficient vertical slot waveguide based phase shifter and a low loss strip waveguide in a single ring. The device is realized on 200 mm silicon-on-insulator wafers using 248 nm DUV lithography and covered with the electro-optic polymer in a post process. This silicon-organic hybrid ring resonator has a small footprint, high optical quality factor, and high DC device tunability. A quality factor of up to 105 and a DC device tunability of about 700 pm/V is experimentally demonstrated in the wavelength range of 1540 nm to 1590 nm. Further, we compare our results with state-of-the-art silicon-organic hybrid devices by determining the poling efficiency. It is demonstrated that the active PSRR is a promising candidate for efficient optical switches and tunable filters.

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Author:Patrick SteglichORCiD, Christian Mai, David Stolarek, Stefan Lischke, Sebastian Kupijai, Claus VillringerORCiD, Silvio Pulwer, Friedhelm Heinrich, Joachim Bauer, Stefan Meister, Dieter Knoll, Mauro CasalboniORCiD, Sigurd SchraderORCiD
URN:urn:nbn:de:kobv:526-opus4-13771
DOI:https://doi.org/10.1117/12.2217725
ISSN:1996-756X
Parent Title (English):Proceedings of SPIE
Document Type:Conference Proceeding
Language:English
Year of Publication:2016
Publishing Institution:Technische Hochschule Wildau
Release Date:2021/02/16
Source:Patrick Steglich, Christian Mai, David Stolarek, Stefan Lischke, Sebastian Kupijai, Claus Villringer, Silvio Pulwer, Friedhelm Heinrich, Joachim Bauer, Stefan Meister, Dieter Knoll, Mauro Casalboni, and Sigurd Schrader "Partially slotted silicon ring resonator covered with electro-optical polymer", Proc. SPIE 9891, Silicon Photonics and Photonic Integrated Circuits V, 98910R (13 May 2016); https://doi.org/10.1117/12.2217725
Copyright:Copyright (2016) Society of Photo‑Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited.
Faculties an central facilities:Fachbereich Ingenieur- und Naturwissenschaften
Dewey Decimal Classification:6 Technik, Medizin, angewandte Wissenschaften / 62 Ingenieurwissenschaften / 621 Angewandte Physik
Licence (German):Das Dokument ist urheberrechtlich geschützt
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