MetadatenAuthor: | Joachim Bauer, Oksana Fursenko, Steffen Marschmeyer, Friedhelm Heinrich, Francesco Villasmunta, Claus VillringerORCiD, Christoph Zesch, Sigurd SchraderORCiD |
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URN: | urn:nbn:de:kobv:526-opus4-16093 |
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DOI (Version of Record): | https://doi.org/10.1116/1.5120617 |
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Parent Title (English): | Journal of Vacuum Science & Technology B |
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Publisher: | American Vacuum Society (AVS) |
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Document Type: | Article |
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Language: | English |
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Year of Publication: | 2019 |
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Year of first Publication: | 2019 |
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Publishing Institution: | Technische Hochschule Wildau |
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Release Date: | 2022/05/11 |
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Volume: | 37 |
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Issue: | 6 |
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Article Number: | 062205 |
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Source: | Joachim Bauer, Oksana Fursenko, Steffen Marschmeyer, Friedhelm Heinrich, Francesco Villasmunta, Claus Villringer, Christoph Zesch, and Sigurd Schrader , "Spectroscopic reflectometry for characterization of Through Silicon Via profile of Bosch etching process", Journal of Vacuum Science & Technology B 37, 062205 (2019) https://doi.org/10.1116/1.5120617 |
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Copyright: | This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in "Joachim Bauer, Oksana Fursenko, Steffen Marschmeyer, Friedhelm Heinrich, Francesco Villasmunta, Claus Villringer, Christoph Zesch, and Sigurd Schrader , "Spectroscopic reflectometry for characterization of Through Silicon Via profile of Bosch etching process", Journal of Vacuum Science & Technology B 37, 062205 (2019)" and may be found at https://doi.org/10.1116/1.5120617. |
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Faculties an central facilities: | Fachbereich Ingenieur- und Naturwissenschaften |
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Dewey Decimal Classification: | 6 Technik, Medizin, angewandte Wissenschaften / 62 Ingenieurwissenschaften / 620 Ingenieurwissenschaften und zugeordnete Tätigkeiten |
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Licence (German): | Das Dokument ist urheberrechtlich geschützt |
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