Silvio Pulwer, Patrick Steglich, Claus Villringer, Joachim Bauer, Martin Burger, M. Franz, K. Grieshober, F. Wirth, J. Blondeau, J. Rautenberg, S. Mouti, Sigurd Schrader
- In this work, a measurement concept based on triangulation was developed for borescopic 3D-surveying of surface defects. The integration of such measurement system into a borescope environment requires excellent space utilization. The triangulation angle, the projected pattern, the numerical apertures of the optical system, and the viewing angle were calculated using partial coherence imaging and geometric optical raytracing methods. Additionally, optical aberrations and defocus were considered by the integration of Zernike polynomial coefficients. The measurement system is able to measure objects with a size of 50 μm in all dimensions with an accuracy of ± 5 μm. To manage the issue of a low depth of field while using an optical high resolution system, a wavelength dependent aperture was integrated. Thereby, we are able to control depth of field and resolution of the optical system and can use the borescope in measurement mode with high resolution and low depth of field or in inspection mode with low resolution and higher depth of field. First measurements of a demonstrator system are in good agreement with our simulations.
MetadatenAuthor: | Silvio Pulwer, Patrick SteglichORCiD, Claus VillringerORCiD, Joachim Bauer, Martin BurgerORCiD, M. Franz, K. Grieshober, F. Wirth, J. Blondeau, J. Rautenberg, S. Mouti, Sigurd SchraderORCiD |
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URN: | urn:nbn:de:kobv:526-opus4-15307 |
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DOI (Version of Record): | https://doi.org/10.1117/12.2225203 |
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Publisher: | SPIE |
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Document Type: | Conference Proceeding |
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Language: | English |
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Year of Publication: | 2016 |
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Publishing Institution: | Technische Hochschule Wildau |
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Release Date: | 2021/09/17 |
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Tag: | 3D measurement; borescope; calibration; defect; lens design; triangulation |
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First Page: | 51 |
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Last Page: | 56 |
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Source: | S. Pulwer, P. Steglich, C. Villringer, J. Bauer, M. Burger, M. Franz, K. Grieshober, F. Wirth, J. Blondeau, J. Rautenberg, S. Mouti, and S. Schrader "Triangulation-based 3D surveying borescope", Proc. SPIE 9890, Optical Micro- and Nanometrology VI, 989009 (26 April 2016); https://doi.org/10.1117/12.2225203 |
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Copyright: | Copyright 2016 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. |
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Faculties an central facilities: | Fachbereich Ingenieur- und Naturwissenschaften |
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Dewey Decimal Classification: | 6 Technik, Medizin, angewandte Wissenschaften / 62 Ingenieurwissenschaften / 620 Ingenieurwissenschaften und zugeordnete Tätigkeiten |
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Licence (German): | Das Dokument ist urheberrechtlich geschützt |
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