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The Role of Substrate Temperature and Magnetic Filtering for DLC by Cathodic Arc Evaporation

  • Diamond-like carbon (DLC) films were deposited using two different types of high current arc evaporation. The first process used a magnetic particle filter to remove droplets from the plasma. For the second process, the samples were put into a metallic cage which was placed directly above the plasma source. For both processes, we varied the substrate temperature from 21 to 350 °C in order to investigate the temperature effect. The samples were characterized using SEM, AFM, XPS, Raman Spectroscopy, Ellipsometry, Photometry, and Nano Indentation in order to compare both methods of deposition and provide a careful characterization of such DLC films. We found that the sp3 content and the hardness can be precisely adjusted by changing the substrate temperature. Furthermore, in the case of unfiltered deposition, the optical constants can be shifted in the direction of higher absorbance in order to produce black and hard carbon coatings.

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Metadaten
Author:Helge Lux, Matthias Edling, Massimiliano Lucci, Julia Kitzmann, Claus VillringerORCiD, Peter Siemroth, Fabio De MatteisORCiD, Sigurd SchraderORCiD
URN:urn:nbn:de:kobv:526-opus4-12295
DOI:https://doi.org/10.3390/coatings9050345
ISSN:2079-6412
Parent Title (English):Coatings
Document Type:Article
Language:English
Year of Publication:2019
Publishing Institution:Technische Hochschule Wildau
Release Date:2019/06/03
Tag:DLC; arc evaporation; ellipsometry; hardness; optical constant; substrate temperature; ta-C
Volume:9
Issue:5
First Page:345
Source:Lux, H.; Edling, M.; Lucci, M.; Kitzmann, J.; Villringer, C.; Siemroth, P.; De Matteis, F.; Schrader, S. The Role of Substrate Temperature and Magnetic Filtering for DLC by Cathodic Arc Evaporation. Coatings 2019, 9, 345.
Faculties an central facilities:Fachbereich Ingenieur- und Naturwissenschaften
Dewey Decimal Classification:6 Technik, Medizin, angewandte Wissenschaften / 62 Ingenieurwissenschaften / 620 Ingenieurwissenschaften und zugeordnete Tätigkeiten
Funding:DFG-geförderter Publikationsfonds
Licence (German):Creative Commons - CC BY - Namensnennung 4.0 International
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