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Micro-cavities based on width modulated SOI waveguides

  • We have designed, fabricated and investigated one-dimensional (1D) micro-cavities in Silicon-on-Insulator (SOI) waveguides. The single mode waveguides are fabricated in a 220 nm silicon device layer. The 1D micro-cavities in Fabry-Perot structure consist of two Bragg-mirror regions formed by a sinusoidal modulation of the waveguide width. The mirror regions are separated by a sub-micron spacer. The SOI photonic structures are produced in a CMOS environment using 248 nm DUV lithography. The waveguides as well as the width modulated mirror regions are designed using a single mask and are fabricated in a shallow trench process. The transmission spectra of these width modulated micro-cavities with different mirror reflectivities and cavity lengths are investigated. Q-factors up to 855 could be observed at 1550 nm wavelength with low insertion loss of 1.9 dB. The width modulated micro-cavities, including the mirror regions, have lengths of less than 20 microns and widths of maximum 450 nm. These small foot-print cavities act as band pass filters and can be used as resonators for laser or electro-optic modulation of light.

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Author:Stefan Meister, Aws Al-Saadi, Bülent A. Franke, Shaimaa Mahdi, Miroslaw Szczambura, Berndt Kuhlow, Ulrike Woggon, Lars ZimmermannORCiD, Harald H. Richter, David Stolarek, Sigurd SchraderORCiD, Hans J. Eichler
URN:urn:nbn:de:kobv:526-opus4-15233
DOI (Version of Record):https://doi.org/10.1117/12.875652
Publisher:Society of Photo-Optical Instrumentation Engineers (SPIE)
Document Type:Conference Proceeding
Language:English
Year of Publication:2011
Publishing Institution:Technische Hochschule Wildau
Release Date:2021/09/16
Tag:CMOS; SOI waveguide; band-pass filter; micro-cavity; micro-resonator; silicon photonics
First Page:199
Last Page:204
Source:Stefan Meister, Aws Al-Saadi, Bülent A. Franke, Shaimaa Mahdi, Miroslaw Szczambura, Berndt Kuhlow, Ulrike Woggon, Lars Zimmermann, Harald H. Richter, David Stolarek, Sigurd K. Schrader, and Hans J. Eichler "Micro-cavities based on width modulated SOI waveguides", Proc. SPIE 7943, Silicon Photonics VI, 79430T (17 January 2011); https://doi.org/10.1117/12.875652
Copyright:Copyright 2011 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Faculties an central facilities:Fachbereich Ingenieurwesen / Wirtschaftsingenieurwesen (bis 8/2014)
Dewey Decimal Classification:6 Technik, Medizin, angewandte Wissenschaften / 62 Ingenieurwissenschaften / 620 Ingenieurwissenschaften und zugeordnete Tätigkeiten
Licence (German):Das Dokument ist urheberrechtlich geschützt
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