MetadatenAuthor: | Patrick SteglichORCiD, Martin Paul, Christian Mai, Andrea Böhme, Siegfried Bondarenko, Michael G. Weller, Andreas MaiORCiD |
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URN: | urn:nbn:de:kobv:526-opus4-13925 |
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DOI: | https://doi.org/10.1117/12.2588791 |
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Parent Title (English): | Proc. SPIE 11772, Optical Sensors 2021 |
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Document Type: | Conference Proceeding |
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Language: | English |
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Year of Publication: | 2021 |
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Publishing Institution: | Technische Hochschule Wildau |
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Release Date: | 2021/04/20 |
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Source: | Patrick Steglich, Martin Paul, Christian Mai, Andrea Böhme, Siegfried Bondarenko, Michael G. Weller, and Andreas Mai "A monolithically integrated micro fluidic channel in a silicon-based photonic-integrated-circuit technology for biochemical sensing", Proc. SPIE 11772, Optical Sensors 2021, 1177206 (18 April 2021); https://doi.org/10.1117/12.2588791 |
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Copyright: | Copyright 2021 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. |
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Faculties an central facilities: | Fachbereich Ingenieur- und Naturwissenschaften |
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Dewey Decimal Classification: | 6 Technik, Medizin, angewandte Wissenschaften / 62 Ingenieurwissenschaften / 621 Angewandte Physik |
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Licence (German): | Das Dokument ist urheberrechtlich geschützt |
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