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A monolithically integrated micro fluidic channel in a silicon-based photonic-integrated-circuit technology for biochemical sensing

  • In this work, a cost-effective optofluidic system is propossed and preliminary experimental results are presented. A microfluidic channel monolithically integrated into a photonic integrated circuit technology is used in conjunc- tion with a cyclo-olefin copolymer (COC) substrate to provide fluidic in- and output ports. We report on initial experimental results as well as on the simple and cost-effective fabrication of this optofluidic system by means of micro-milling.

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Author:Patrick SteglichORCiD, Martin Paul, Christian Mai, Andrea Böhme, Siegfried Bondarenko, Michael G. Weller, Andreas MaiORCiD
URN:urn:nbn:de:kobv:526-opus4-13925
DOI:https://doi.org/10.1117/12.2588791
Parent Title (English):Proc. SPIE 11772, Optical Sensors 2021
Document Type:Conference Proceeding
Language:English
Year of Publication:2021
Publishing Institution:Technische Hochschule Wildau
Release Date:2021/04/20
Source:Patrick Steglich, Martin Paul, Christian Mai, Andrea Böhme, Siegfried Bondarenko, Michael G. Weller, and Andreas Mai "A monolithically integrated micro fluidic channel in a silicon-based photonic-integrated-circuit technology for biochemical sensing", Proc. SPIE 11772, Optical Sensors 2021, 1177206 (18 April 2021); https://doi.org/10.1117/12.2588791
Copyright:Copyright 2021 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Faculties an central facilities:Fachbereich Ingenieur- und Naturwissenschaften
Dewey Decimal Classification:6 Technik, Medizin, angewandte Wissenschaften / 62 Ingenieurwissenschaften / 621 Angewandte Physik
Licence (German):Das Dokument ist urheberrechtlich geschützt
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