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Lateral Selective SiGe Growth for Local Dislocation-Free SiGe-on-Insulator Virtual Substrate Fabrication

  • Dislocation free local SiGe-on-insulator (SGOI) virtual substrate is fabricated using lateral selective SiGe growth by reduced pressure chemical vapor deposition. The lateral selective SiGe growth is performed around a ∼1.25 μm square Si (001) pillar in a cavity formed by HCl vapor phase etching of Si at 850 °C from side of SiO2/Si mesa structure on buried oxide. Smooth root mean square roughness of SiGe surface of 0.14 nm, which is determined by interface roughness between the sacrificially etched Si and the SiO2 cap, is obtained. Uniform Ge content of ∼40% in the laterally grown SiGe is observed. In the Si pillar, tensile strain of ∼0.65% is found which could be due to thermal expansion difference between SiO2 and Si. In the SiGe, tensile strain of ∼1.4% along 〈010〉 direction, which is higher compared to that along 〈110〉 direction, is observed. The tensile strain is induced from both [110] and [−110] directions. Threading dislocations in the SiGe are located only ∼400 nm from Si pillar and stacking faults are running towards 〈110〉 directions, resulting in the formation of a wide dislocation-free area in SiGe along 〈010〉 due to horizontal aspect ratio trapping.

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Author:Ketan AnandORCiD, Markus Andreas Schubert, Agnieszka Anna Corley-WiciakORCiD, Davide SpiritoORCiD, Cedric Corley-WiciakORCiD, Wolfgang M. Klesse, Andreas MaiORCiD, Bernd Tillack, Yuji YamamotoORCiD
URN:urn:nbn:de:kobv:526-opus4-17013
DOI (Version of Record):https://doi.org/10.1149/2162-8777/acb739
Parent Title (English):ECS Journal of Solid State Science and Technology
Publisher:Electrochemical Society (ECS); IOP
Document Type:Article
Language:English
Year of Publication:2023
Publishing Institution:Technische Hochschule Wildau
Release Date:2023/02/15
Volume:12
Article Number:024003
Source:K. Anand et al 2023 ECS J. Solid State Sci. Technol. 12 024003
Faculties an central facilities:Fachbereich Ingenieur- und Naturwissenschaften
Dewey Decimal Classification:5 Naturwissenschaften und Mathematik / 54 Chemie / 541 Physikalische Chemie
Licence (German):Creative Commons - CC BY - Namensnennung 4.0 International
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