The search result changed since you submitted your search request. Documents might be displayed in a different sort order.
  • search hit 3 of 4
Back to Result List

Photonic crystal microcavities in SOI waveguides produced in a CMOS environment

  • We have investigated microcavities in Silicon-on-Insolator (SOI) waveguides. The rectangular waveguides with 500 nm width are fabricated in the 220 nm silicon device layer. The microcavities are formed by one-dimensional photonic crystals in Fabry-Perot structure directly written in the waveguides. The SOI photonic structures are produced in a CMOS environment using 248 nm DUV lithography, where the waveguides as well as the photonic crystals are created in the same step using a single mask. In order to achieve a desired spectral shape of the filter function capable for several applications, a number of different cavities were investigated, e.g. single cavities of first and higher order as well as multi-cavity filters. The experimental results are compared with simulations of photonic crystal microcavities in strip waveguides. The spectral transmission function of such filters dependent on the design parameters are calculated by an analysis based on Finite-Difference-Time-Domain (FDTD) method.

Download full text files

Export metadata

Additional Services

Search Google Scholar Statistics
Metadaten
Author:Stefan Meister, Aws Al-Saadi, Bülent A. Franke, Shaimaa Mahdi, Berndt Kuhlow, Karsten Voigt, Bernd Tillack, Harald H. Richter, Lars ZimmermannORCiD, Viachaslau KsianzouORCiD, Sigurd SchraderORCiD, Hans J. Eichler
URN:urn:nbn:de:kobv:526-opus4-15223
DOI (Version of Record):https://doi.org/10.1117/12.842714
Publisher:Society of Photo-Optical Instrumentation Engineers (SPIE)
Document Type:Conference Proceeding
Language:English
Year of Publication:2010
Publishing Institution:Technische Hochschule Wildau
Release Date:2021/09/16
Tag:FDTD simulation; SOI waveguide; band-pass filter; microcavity; photonic crystal; silicon photonics
First Page:330
Last Page:339
Source:Stefan Meister, Aws Al-Saadi, Bülent A. Franke, Shaimaa Mahdi, Berndt Kuhlow, Karsten Voigt, Bernd Tillack, Harald H. Richter, Lars Zimmermann, Viachaslau Ksianzou, Sigurd K. Schrader, and Hans J. Eichler "Photonic crystal microcavities in SOI waveguides produced in a CMOS environment", Proc. SPIE 7606, Silicon Photonics V, 760616 (16 February 2010); https://doi.org/10.1117/12.842714
Copyright:Copyright 2010 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Faculties an central facilities:Fachbereich Ingenieurwesen / Wirtschaftsingenieurwesen (bis 8/2014)
Dewey Decimal Classification:6 Technik, Medizin, angewandte Wissenschaften / 62 Ingenieurwissenschaften / 620 Ingenieurwissenschaften und zugeordnete Tätigkeiten
Licence (German):Das Dokument ist urheberrechtlich geschützt
Verstanden ✔
Diese Webseite verwendet technisch erforderliche Session-Cookies. Durch die weitere Nutzung der Webseite stimmen Sie diesem zu. Unsere Datenschutzerklärung finden Sie hier.