CMOS-Compatible Silicon Photonic Sensor for Refractive Index Sensing Using Local Back-Side Release
- Silicon photonic sensors are promising candidates for lab-on-a-chip solutions with versatile applications and scalable production prospects using complementary metal-oxide semiconductor (CMOS) fabrication methods. However, the widespread use has been hindered because the sensing area adjoins optical and electrical components making packaging and sensor handling challenging. In this work, a local back-side release of the photonic sensor is employed, enabling a separation of the sensing area from the rest of the chip. This approach allows preserving the compatibility of photonic integrated circuits in the front-end of line and metal interconnects in the back-end of line. The sensor is based on a micro-ring resonator and is fabricated on wafer-level using a CMOS technology. We revealed a ring resonator sensitivity for homogeneous sensing of 106 nm/RIU.
Author: | Patrick SteglichORCiD, Siegfried Bondarenko, Christian Mai, Martin Paul, Michael G. Weller, Andreas MaiORCiD |
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URN: | urn:nbn:de:kobv:526-opus4-13649 |
DOI (Version of Record): | https://doi.org/10.1109/LPT.2020.3019114 |
ISSN: | 1941-0174 |
Parent Title (English): | IEEE Photonics Technology Letters |
Document Type: | Article |
Language: | English |
Year of Publication: | 2020 |
Publishing Institution: | Technische Hochschule Wildau |
Release Date: | 2021/01/08 |
Volume: | 32 |
Issue: | 19 |
First Page: | 1241 |
Last Page: | 1244 |
Source: | Steglich, P., Bondarenko, S., Mai, C., Paul, M., Weller, M., & Mai, A. (2020). CMOS-Compatible Silicon Photonic Sensor for Refractive Index Sensing Using Local Back-Side Release IEEE Photonics Technology Letters. 32 (19), 1241-1244. |
Faculties an central facilities: | Fachbereich Ingenieur- und Naturwissenschaften |
Dewey Decimal Classification: | 6 Technik, Medizin, angewandte Wissenschaften / 62 Ingenieurwissenschaften / 621 Angewandte Physik |
Licence (German): | Creative Commons - CC BY - Namensnennung 4.0 International |