TY - CHAP A1 - Steglich, Patrick A1 - Mai, Christian A1 - Stolarek, David A1 - Lischke, Stefan A1 - Kupijai, Sebastian A1 - Villringer, Claus A1 - Pulwer, Silvio A1 - Heinrich, Friedhelm A1 - Bauer, Joachim A1 - Meister, Stefan A1 - Knoll, Dieter A1 - Casalboni, Mauro A1 - Schrader, Sigurd T1 - Partially slotted silicon ring resonator covered with electro-optical polymer T2 - Proceedings of SPIE N2 - In this work, we present for the first time a partially slotted silicon ring resonator (PSRR) covered with an electro-optical polymer (Poly[(methyl methacrylate)-co-(Disperse Red 1 acrylate)]). The PSRR takes advantage of both a highly efficient vertical slot waveguide based phase shifter and a low loss strip waveguide in a single ring. The device is realized on 200 mm silicon-on-insulator wafers using 248 nm DUV lithography and covered with the electro-optic polymer in a post process. This silicon-organic hybrid ring resonator has a small footprint, high optical quality factor, and high DC device tunability. A quality factor of up to 105 and a DC device tunability of about 700 pm/V is experimentally demonstrated in the wavelength range of 1540 nm to 1590 nm. Further, we compare our results with state-of-the-art silicon-organic hybrid devices by determining the poling efficiency. It is demonstrated that the active PSRR is a promising candidate for efficient optical switches and tunable filters. Y1 - 2016 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-13771 SN - 1996-756X ER -