TY - JOUR A1 - Bondarenko, Siegfried A1 - Villringer, Claus A1 - Steglich, Patrick T1 - Comparative Study of Nano-Slot Silicon Waveguides Covered by Dye Doped and Undoped Polymer Cladding JF - Applied Sciences N2 - Nonlinear optical dyes doped in optical polymer matrices are widely used for electro-optical devices. Linear optical properties change with dye concentration, which leads to a change in modal properties, especially in nano-structured integrated waveguides such as silicon slot-waveguides. Here, we investigate the influence of a nonlinear optical dye on the performance of a silicon-organic hybrid slot-waveguide. A simulation study of the modal and optical confinement properties is carried out and dependence of the structural parameters of the slot-waveguide and the organic cladding material is taken into account. As cladding material, a guest-host polymer system is employed comprising the nonlinear optical dye Disperse Red 1 (DR1) doped in a poly[methyl methacrylate] (PMMA) matrix. The refractive indices of doped and undoped PMMA were deduced from ellipsometric data. We present a guideline for an optimized slot-waveguide design for the fabrication in silicon-on-insulator technology giving rise to scalable, high-performance integrated electro-optical modulators. KW - silicon photonics KW - modeling and simulation at the nanoscale KW - nonlinear optics at the nanoscale KW - slot waveguide KW - silicon-on-insulator technology Y1 - 2019 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-10716 SN - 2076-3417 VL - 9 IS - 1 PB - MDPI ER - TY - JOUR A1 - Steglich, Patrick A1 - Hülsemann, Marcel A1 - Dietzel, Birgit A1 - Mai, Andreas T1 - Optical Biosensors Based on Silicon-On-Insulator Ring Resonators: A Review JF - Molecules N2 - Recent developments in optical biosensors based on integrated photonic devices are reviewed with a special emphasis on silicon-on-insulator ring resonators. The review is mainly devoted to the following aspects: (1) Principles of sensing mechanism, (2) sensor design, (3) biofunctionalization procedures for specific molecule detection and (4) system integration and measurement set-ups. The inherent challenges of implementing photonics-based biosensors to meet specific requirements of applications in medicine, food analysis, and environmental monitoring are discussed. KW - biosensor KW - biophotonics KW - integrated optical sensor KW - aptamer KW - biomaterial KW - optical sensor KW - silicon photonics KW - ring resonator KW - lab-on-a-chip Y1 - 2019 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-10822 SN - 1420-3049 VL - 24 IS - 3 ER - TY - CHAP A1 - Tannenberg, Robert A1 - Paul, Martin A1 - Fünning, Tabea A1 - Schumann, Christoph A1 - Weller, Michael G. A1 - Steglich, Patrick ED - Baldini, Francesco ED - Homola, Jiri ED - Lieberman, Robert A. T1 - Multichannel real-time detection of biomarkers with highly miniaturized photonic microchips T2 - Proceedings of SPIE : Optical Sensors 2025 N2 - The development of novel photonic integrated microchips (PIC) is a promising approach to allow for the convenient detection of key biomarkers in complex matrices through multichannel real-time analysis in a highly compact package. This study reports the successful development and application of a backside released CMOS chip designed for the multichannel real-time detection of biomarkers. Operating at the C-band at approx. 1550 nm, the microchip features three dedicated detection sensors in addition to a reference sensor, enabling simultaneous analysis of multiple biomarkers. The compact and highly miniaturized design of this microchip, with a footprint of just 1 mm², positions it as promising candidate for point-of-care diagnostics and personalized medicine applications. This technology opens a path to transform biomarker detection across various medical fields, offering rapid, reliable, and cost-effective diagnostic solutions. In conclusion, the presented multichannel photonic microchips signify a substantial leap forward in real-time biomarker detection, providing a highly capable platform for future research and clinical applications. KW - photonic biosensor KW - silicon photonics KW - photonic integrated circuit KW - immunosensor KW - biochemical sensor KW - optical biosensor KW - surface functionalization Y1 - 2025 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-20456 VL - 13527 PB - SPIE ER - TY - CHAP A1 - Villasmunta, Francesco A1 - Steglich, Patrick A1 - Villringer, Claus A1 - Schrader, Sigurd A1 - Schenk, Harald A1 - Mai, Andreas A1 - Regehly, Martin ED - Chen, Ray T. ED - Schröder, Henning T1 - Design, fabrication, and characterization of integrated optical through-silicon waveguides for 3D photonic interconnections T2 - Optical Interconnects XXIV N2 - In the context of an ever-growing volume of data generated by established and emerging technologies, such as 5G, the Internet of Things, artificial intelligence, machine learning, blockchain, and virtual reality, faster communication speed is demanded by data centers and high-performance computing. Transceiver requirements surged from 100 to 400 Gb/s and beyond. In this scenario, photonics aims to enable Tb/s optical communication at energies below 1 pJ/bit. Targeting higher communication rates while maintaining a low power budget can significantly benefit from 3D photonic chip architectures. This paper presents the simulation-based design, fabrication, and characterization of a monolithically integrated optical through-silicon waveguide that facilitates the connection between different surfaces of a silicon chip. Deep reactive ion etching was employed in both the Bosch and Cryogenic variants to evaluate the effect of sidewall roughness on propagation losses. The mechanical stability of the waveguide was ensured by interrupting the annular trench with a bridging structure. The high-refractive-index contrast to air provides tight light confinement for a core size of up to 50 μm and multimode operation at 1550 nm. The morphology was characterized using scanning electron microscopy (SEM), and optical transmission characterization was performed using relative power loss measurements. A tunable laser source was buttcoupled to a waveguide to analyze light transmission efficiency. Preliminary measurements using single-mode fiber show that the transmitted values exceeded 99% for all structures. KW - multimode photonics KW - cryogenic etching KW - ICP-DRIE KW - optical interconnects KW - silicon photonics KW - 3D chip stacking Y1 - 2024 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-19759 VL - 12892 PB - Society of Photo-Optical Instrumentation Engineers (SPIE) ER -