TY - CHAP A1 - Geisler, Sebastian A1 - Bauer, Joachim A1 - Haak, Ulrich A1 - Stolarek, David A1 - Schulz, K. A1 - Wolf, H. A1 - Meier, W. A1 - Trojahn, M. A1 - Matthus, E. A1 - Beyer, Harald A1 - Old, G. A1 - Marschmeyer, Steffen A1 - Kuck, B. T1 - Double exposure technology for KrF lithography N2 - The application of Double Exposure Lithography (DEL) would enlarge the capability of 248 nm exposure technique to smaller pitch. We will use the DEL for the integration of critical layers for dedicated applications requiring resolution enhancement into 0.13 μm BiCMOS technology. In this paper we present the overlay precision and the focus difference of 1st and 2nd exposure as critical parameters of the DEL for k1 ≤ 0.3 lithography (100 nm half pitch) with binary masks (BIM). The realization of excellent overlay (OVL) accuracy is a main key of double exposure and double patterning techniques. We show the DEL requires primarily a good mask registration, when the wafer stays in the scanner for both exposures without alignment between 1st and 2nd exposure. The exposure tool overlay error is more a practical limit for double patterning lithography (DPL). Hence we prefer the DEL for the resolution enhancement, especially if we use the KrF high NA lithography tool for 130 nm generation. Experimental and simulated results show that the critical dimension uniformity (CDU) depends strongly on the overlay precision. The DEL results show CDU is not only affected by the OVL but also by an optical proximity effect of 1st and 2nd exposure and the mask registration. The CD uniformity of DEL demands a low focus difference between 1st and 2nd exposure and therefore requires a good focus repeatability of the exposure tool. The Depth of Focus (DOF) of 490 nm at stable CD of lines was achieved for DEL. If we change the focus of one of the exposures the CD-focus performance of spaces was reduced with simultaneous line position changing. CDU vs. focus difference between 1st and 2nd exposure demands a focus repeatability <100 nm for the exposure tool. Summary, the results show DEL has the potential to be a practical lithography enhancement method for device fabrication using high NA KrF tool generation. KW - double exposure lithography KW - double patterning lithography KW - KrF Y1 - 2008 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-15176 SP - 65 EP - 73 PB - Society of Photo-Optical Instrumentation Engineers (SPIE) ER - TY - JOUR A1 - Bauer, Joachim A1 - Gutke, Marko A1 - Heinrich, Friedhelm A1 - Edling, Matthias A1 - Stoycheva, Vesela A1 - Kaltenbach, Alexander A1 - Burkhardt, Martin A1 - Gruenefeld, Martin A1 - Gamp, Matthias A1 - Gerhard, Christoph A1 - Steglich, Patrick A1 - Steffen, Sebastian A1 - Herzog, Michael A1 - Dreyer, Christian A1 - Schrader, Sigurd T1 - Novel UV-transparent 2-component polyurethane resin for chip-on-board LED micro lenses JF - Optical Materials Express N2 - In this work we present a novel optical polymer system based on polyurethane elastomer components, which combines excellent UV transparency with high thermal stability, good hardness, high surface tension and long pot life. The material looks very promising for encapsulation and microlensing applications for chip-on-board (CoB) light-emitting diodes (LED). The extinction coefficient k, refractive index n, and bandgap parameters were derived from transmission and reflection measurements in a wavelength range of 200-890 nm. Thermogravimetry and differential scanning calorimetry were used to provide glass transition and degradation temperatures. The surface tension was determined by means of contact angle measurements. As proof of concept, a commercial InGaN-CoB-LED is used to demonstrate the suitability of the new material for the production of microlenses. Y1 - 2020 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-13472 SN - 2159-3930 VL - 10 IS - 9 SP - 2085 EP - 2099 ER -