TY - JOUR A1 - Lux, Helge A1 - Edling, Matthias A1 - Lucci, Massimiliano A1 - Kitzmann, Julia A1 - Villringer, Claus A1 - Siemroth, Peter A1 - De Matteis, Fabio A1 - Schrader, Sigurd T1 - The Role of Substrate Temperature and Magnetic Filtering for DLC by Cathodic Arc Evaporation JF - Coatings N2 - Diamond-like carbon (DLC) films were deposited using two different types of high current arc evaporation. The first process used a magnetic particle filter to remove droplets from the plasma. For the second process, the samples were put into a metallic cage which was placed directly above the plasma source. For both processes, we varied the substrate temperature from 21 to 350 °C in order to investigate the temperature effect. The samples were characterized using SEM, AFM, XPS, Raman Spectroscopy, Ellipsometry, Photometry, and Nano Indentation in order to compare both methods of deposition and provide a careful characterization of such DLC films. We found that the sp3 content and the hardness can be precisely adjusted by changing the substrate temperature. Furthermore, in the case of unfiltered deposition, the optical constants can be shifted in the direction of higher absorbance in order to produce black and hard carbon coatings. KW - DLC KW - ta-C KW - arc evaporation KW - substrate temperature KW - hardness KW - optical constant KW - ellipsometry Y1 - 2019 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-12295 SN - 2079-6412 VL - 9 IS - 5 SP - 345 ER - TY - JOUR A1 - Steglich, Patrick A1 - Villringer, Claus A1 - Dietzel, Birgit A1 - Mai, Christian A1 - Schrader, Sigurd A1 - Casalboni, Mauro A1 - Mai, Andreas T1 - On-Chip Dispersion Measurement of the Quadratic Electro-Optic Effect in Nonlinear Optical Polymers Using a Photonic Integrated Circuit Technology JF - IEEE Photonics Journal N2 - A novel method to determine the dispersion of the quadratic electro-optic effect in nonlinear optical materials by using a silicon-on-insulator microring resonator is presented. The microring consists of a silicon slot waveguide enabling large dc electric field strength at low applied voltages. The dispersion of third-order hyperpolarizability of a linear conjugated dye is approximated by using a two-level model for the off-resonant spectral region. As an example, the dispersion of the resonance wavelength of the resonator filled with a dye doped polymer was measured in dependence of the applied dc voltage. The polymer was poly (methylmethacrylate) doped with 5 wt% disperse red 1 (DR1), and the measurements have been carried out at the telecommunication wavelength band around 1550 nm (optical C-band). The described measurements represent a new technique to determine the dispersion of the third-order susceptibility and molecular hyperpolarizability of the material filled into the slot of the ring-resonator. KW - electro-optical device KW - nonlinear optics KW - integrated optics KW - integrated optics material KW - optical material KW - integrated optics device KW - polymer active device Y1 - 2019 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-12307 SN - 1943-0655 VL - 11 IS - 3 ER - TY - JOUR A1 - Lux, Helge A1 - Edling, Matthias A1 - Siemroth, Peter A1 - Schrader, Sigurd T1 - Fast and Cost-Effective Synthesis of High-Quality Graphene on Copper Foils Using High-Current Arc Evaporation JF - Materials N2 - In this paper, we present an innovative and ultra-fast process for the deposition of high-quality graphene on different metal foils and thin metal films. The graphene layer can be homogeneously deposited in only 30 s process time. Due to the weak adhesion to the substrate material, the monolayer graphene is easy to transfer using the established processes. For the production, we use magnetic filtered high-current arc evaporation (Φ-HCA) with a solid, graphitic carbon source. This ultra-fast growth process can pave the way towards a cost-effective graphene synthesis for the mass production e.g., in a roll-to-roll process, avoiding time consuming established processes. KW - graphene KW - PVD KW - arc evaporation KW - copper KW - transfer KW - Φ-HCA Y1 - 2018 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-10359 SN - 1996-1944 VL - 11 IS - 5 SP - 1 EP - 10 ER - TY - JOUR A1 - Grytsenko, Kostyantyn A1 - Ksianzou, Viachaslau A1 - Kolomzarov, Yurii A1 - Lytvyn, Peter A1 - Dietzel, Birgit A1 - Schrader, Sigurd T1 - Fluoropolymer Film Formation by Electron Activated Vacuum Deposition JF - Surfaces N2 - Polytetrafluoroethylene (PTFE), polyhexafluoropropylene (PHFP) and polychlorotrifluoroethylene (PCTFE) were heated to their decomposition temperature in a high vacuum. The emitted fragments passed an electron cloud, condensed on a substrate and formed fluoropolymer film. Growth rate of PTFE and PHFP films increased up to a factor five in the presence of the electron cloud. Mass spectrometry revealed changes in the mass spectra of fragments generated by thermal decomposition only and formed under electron activation. The observed changes were different for each fluoropolymer. Infrared spectroscopy (IRS) showed that the structure of the films was close to the structure of the bulk polymers. Atomic force microscopy (AFM) has revealed different morphologies of PTFE, PHFP and PCTFE films, suggesting a Volmer–Weber growth mechanism for PTFE and PHFP but a Frank-van der Merwe one for PCTFE. All films were smooth at nanoscale and transparent from ultraviolet to near-infrared region. Additional radio frequency (RF) plasma ignited in the emitted fragments at a low pressure increased mechanical characteristics of the films without losing their optical transparency and smoothness. KW - fluoropolymer thin film KW - vacuum deposition KW - polymerization KW - plasma KW - surface Y1 - 2021 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-13786 SN - 2571-9637 VL - 4 IS - 1 SP - 66 EP - 80 PB - MDPI ER - TY - JOUR A1 - Dimitriev, O. P. A1 - Grytsenko, Kostyantyn A1 - Tolmachev, O. I. A1 - Slominskii, Yu L. A1 - Kudinova, M. A. A1 - Schrader, Sigurd T1 - Effect of Concentration on Isomerization of Rhodanine Derivatives of Merocyanine Dyes in Polar Solvents JF - Advances in Physical Chemistry N2 - Rhodanine derivatives of merocyanine dyes with residues of 1,3,3-trimethyl-3H-indole and 3-ethylbenzothiazoline have been found to possess two molecular forms in diluted solutions of polar solvents such as dimethylformamide, dimethyl sulfoxide, and N-methylpyrrolidinone. The first molecular form was observed to prevail at low concentrations of the dyes, normally up to 10−5 M. The second one prevails at higher concentrations and is displayed through a new band in the electronic absorption spectrum, which is red-shifted with respect to the absorption band of the first form. No similar effect was found for these dyes by use of nonpolar solvents or upon alkyl-substitution of the molecules at nitrogen atom in the rhodanine moiety. We assign the above two forms to different molecular isomers and the analogous spectral changes were shown to take place by light or heat influence which correspond to a typical isomerization effect for the related merocyanine dyes. It is discussed that the isomer transformation is facilitated by the increased mobility of the proton bonded to the nitrogen atom of the rhodanine moiety in the polar environment and the increased amount of dye-dye collisions. Y1 - 2014 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-5931 SN - 1687-7993 VL - 2014 ER - TY - JOUR A1 - Grytsenko, Kostyantyn A1 - Lozovski, Valeri A1 - Strilchuk, Galyna A1 - Schrader, Sigurd T1 - Evaluation of the Mechanism of the Gold Cluster Growth during Heating of the Composite Gold-Polytetrafluoroethylene Thin Film JF - Nanomaterials N2 - Nanocomposite films consisting of gold inclusions in the polytetrafluoroethylene (PTFE) matrix were obtained by thermal vacuum deposition. Annealing of the obtained films with different temperatures was used to measure varying of film morphologies. The dependence of optical properties of the films on their morphology was studied. It was established that absorption and profile of the nanocomposite film obtained by thermal vacuum deposition can be changed with annealing owing to the fact that different annealing temperatures lead to different average particle sizes. A method to calculate the optical properties of nanocomposite thin films with inclusions of different sizes was proposed. Thus, comparison of experimental optical spectra with the spectra obtained during the simulation enables estimating average sizes of inclusions. The calculations give the possibility of understanding morphological changes in the structures. KW - nanocomposite KW - gold KW - polytetrafluoroethylene KW - optical spectroscopy KW - microscopy KW - thin film Y1 - 2012 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-6387 SN - 2079-4991 VL - 2 IS - 4 SP - 366 EP - 378 ER - TY - JOUR A1 - Villringer, Claus A1 - Steglich, Patrick A1 - Pulwer, Silvio A1 - Schrader, Sigurd A1 - Laufer, Jan T1 - Electro-optical properties of doped polymers with high transparency in the visible wavelength range JF - Optical Materials Express N2 - The electro-optical (EO) properties of poly(methyl methacrylate) and the photopolymer poly(vinyl cinnamate) doped with varying concentrations of the EO chromophore 2-Methyl-4-nitroaniline were measured. The EO polymers were embedded in Fabry-Pérot etalons for the simultaneous determination of the Pockels and Kerr coefficients from measurements of the fringe shift induced by an external electric field. It was found that the host polymer has a significant impact on the EO performance and that the undoped host polymers exhibit a significant Pockels effect. Moreover, the Kerr effect provides a substantial contribution of 27% to the total change of the refractive index at relatively high electric field strengths of E = 91.2 MV m−1. KW - Bragg reflector KW - fiber optic coupler KW - refractive index KW - spatial light modulator KW - transparency KW - tunable filter Y1 - 2021 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-15480 VL - 11 IS - 11 SP - 3801 EP - 3811 PB - Optica Publishing Group ER - TY - JOUR A1 - Bauer, Joachim A1 - Fursenko, Oksana A1 - Heinrich, Friedhelm A1 - Gutke, Marko A1 - Kornejew, Eckhart A1 - Brödel, Oliver A1 - Dietzel, Birgit A1 - Kaltenbach, Alexander A1 - Burkhardt, Martin A1 - Edling, Matthias A1 - Steglich, Patrick A1 - Herzog, Michael A1 - Schrader, Sigurd T1 - Determination of optical constants and scattering properties of transparent polymers for use in optoelectronics JF - Optical Materials Express N2 - Knowledge of optical constants, i.e. refractive index n and extinction coefficient k, and light scattering properties of optical polymers are required to optimize micro-optics for light-emitting diodes in terms of efficiency, color properties and light distribution. We present here a model-based diagnostic approach to determine the optical properties of polymers, which should be particularly useful in the development of plastics for optical applications. Optical constants and scattering coefficients were obtained from transmission and reflection measurements in a wavelength range from UV to NIR taking into account scattering effects due to rough surfaces and volume inhomogeneity. Based on the models for the dielectric function, the molecular optical transition energies Eg, critical point energies, Urbach energies and exciton transition energies were determined. Rayleigh and Mie scattering model and van de Hulst's anomalous diffraction theory were applied to characterize scattering due to volume inhomogeneities. Scalar diffraction theory was applied to account for surface roughness scattering. Atomic force microscopy with nanomechanical characterization was used to characterize domains in size and shape and to assign optical scattering to a suitable morphological model. The combined optical and mechanical characterization help to improve the qualification of new polymer materials for optical applications. KW - diffraction theory KW - light property KW - optical constant KW - optical material KW - optical property KW - scattering theory Y1 - 2022 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-15666 VL - 12 IS - 1 SP - 204 EP - 224 PB - Optica Publishing Group ER - TY - JOUR A1 - Sopinskyy, Mykola A1 - Grytsenko, Kostyantyn A1 - Villringer, Claus A1 - Kolomzarov, Yurii A1 - Schrader, Sigurd T1 - Determination of scattering and Urbach absorption contributions to the light extinction in PTFE films by using graphical representation technique and numerical solution of the inverse problem JF - Semiconductor Physics, Quantum Electronics & Optoelectronics N2 - Ellipsometrically obtained spectral dependences of ordinary αxy and extra-ordinary αz extinction/attenuation coefficients within the spectral range λ = 300…980 nm of uniaxially anisotropic polytetrafluoroethylene (PTFE) films were analyzed. We considered the capabilities and specific features of the graphical representation technique for determining the contribution of Rayleigh scattering and Urbach absorption to light attenuation in the spectral range beyond fundamental absorption. It has been shown that the graphical approach enables to estimate these contributions qualitatively, semi-quantitatively or quantitatively, depending on the situation. The conclusions made using the analysis of graphical representation are confirmed by numerical solution of the inverse problem via simulation of the αxy (λ), αz (λ) experimental dependences within the framework of a best-fit procedure. Being based on both of these approaches, we have ascertained that, in the as-prepared PTFE films, the so-called anomalous light scattering (ALS) with the spectral dependence of scattering coefficient αs ≈ as λ–p (p > 4) takes place. Transformation of scattering from ALS to the Rayleigh one with p ≈ 4 due to annealing is accompanied by an increase of Urbach (subband) absorption. Both of these factors cause narrowing the dynamic range of extinction coefficient values. Both scattering and absorption coefficients are higher for the component of light polarized along the normal to the substrate as compared to the component polarized in parallel to it. The relationship between observed behavior of the scattering and absorption coefficients and the film structure has been discussed. KW - Rayleigh scattering KW - Urbach tail KW - absorption coefficient KW - scattering coefficient KW - graphical method KW - ellipsometry KW - polytetrafluoroethylene Y1 - 2023 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-18035 SN - 1605-6582 VL - 26 IS - 3 SP - 303 EP - 314 PB - National Academy of Sciences of Ukraine. Institute for Semiconductor Physics CY - Kyiv ER - TY - JOUR A1 - Grytsenko, Kostyantyn A1 - Kolomzarov, Yurii A1 - Lytvyn, Peter A1 - Kondratenko, Olga A1 - Sopinskyy, Mykola A1 - Lebedyeva, Iryna A1 - Niemczyk, Agata A1 - Baranowska, Jolanta A1 - Moszyński, Dariusz A1 - Villringer, Claus A1 - Schrader, Sigurd T1 - Optical and Mechanical Properties of Thin PTFE Films, Deposited from a Gas Phase JF - Macromolecular Materials and Engineering N2 - Thin polytetrafluoroethylene (PTFE) films are produced by deposition from a gas phase by two methods: electron-enhanced vacuum deposition (EVD) and EVD + low-temperature plasma (LTP). Structure, morphology, and composition of the films are studied by IR spectroscopy, atomic force microscopy, and X-ray photoelectron spectroscopy. They are close to the structure of bulk PTFE. The roughness of the films’ surface is changed with gas pressure and LTP power variations. Films are transparent from UV to near-infrared regions. Refractive and extinction indices and their anisotropy are measured by spectral ellipsometry. They are tuned by variations of deposition conditions. Hardness and Young modulus of the films are increased if EVD + low power LTP is used for film deposition. Use of EVD + LTP also increases thermal stability of the films. Contact angle of the films corresponds to the bulk PTFE. The PTFE molecules oriented are preferentially in perpendicular direction to the substrate surface. KW - deposition in vacuum KW - multiphase structure formation KW - optical property KW - plasma KW - polytetrafluoroethylene thin film Y1 - 2023 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-17587 VL - 308 IS - 6 PB - Wiley ER - TY - JOUR A1 - Ksianzou, Viachaslau A1 - Velagapudi, R. K. A1 - Grimm, Bernd A1 - Schrader, Sigurd T1 - Polarization-dependent optical characterization of poly(phenylquinoxaline) thin films JF - Journal of Applied Physics N2 - Linear optical properties of two types of poly(phenylquinoxaline) (PPQ) are studied by multiwavelength prism coupling technique and optical absorption spectroscopy. Surface roughness measurements are done using atomic force microscopy. PPQs form smooth films of high optical quality having refractive indices above 1.7 in the visible and near infrared spectral ranges. Enhanced birefringence of Δn∼0.04Δn∼0.04 has been observed in both PPQ films prepared by spin coating. Sellmeier coefficients are derived for the wavelength range starting from 0.532to1.064μm0.532to1.064μm for both TE and TM polarizations. Quantum chemical calculations both on the semiempirical and on the ab initio level are carried out in order to calculate the first-order molecular polarizability tensors of the polymer repeat units. From the obtained tensor elements, theoretical values for both the average refractive indices and the maximum expectable birefringence are calculated. Based on these values a more detailed interpretation of the experimental findings is carried out. The dispersion of refractive index is quantified by the value of Abbe’s constant (νd)(νd). In our case the value νd≈11νd≈11 indicates high dispersion in the visible spectral range. The imaginary part kk of the complex refractive index n∗=n−ikn*=n−ik reaches values of k⩽10−3k⩽10−3 in the wavelength range from 0.5to1μm0.5to1μm. Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-9761 SN - 1089-7550 VL - 100 IS - 6 ER - TY - JOUR A1 - Yeshchenko, Oleg A. A1 - Dmitruk, Igor M. A1 - Grytsenko, Kostyantyn A1 - Prokopets, Vadym M. A1 - Kotko, Andriy V. A1 - Schrader, Sigurd T1 - Influence of interparticle interaction on melting of gold nanoparticles in Au/polytetrafluoroethylene nanocomposites JF - Journal of Applied Physics N2 - The temperature dependence of the surface plasmon resonance energy and width in 5 nm spherical gold nanoparticles embedded in a polymer polytetrafluoroethylene matrix has been studied using absorption spectroscopy. The jumplike features have been observed in these dependences indicating the melting of gold nanoparticles at temperatures considerably lower than the bulk melting point. The interaction between gold nanoparticles sufficiently affects the melting of nanoparticles. The increase in the filling factor of the particles leads to a decrease in the melting temperature of gold nanoparticles. Y1 - 2009 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-9759 SN - 1089-7550 VL - 105 IS - 9 ER - TY - JOUR A1 - Grytsenko, Kostyantyn A1 - Schrader, Sigurd A1 - Detert, Heiner T1 - Ultra-stable dye-filled polytetrafluoroethylene thin films JF - Nanoscience & Technology: Open Access N2 - Polytetrafluoroethylene (PTFE) and polyparaphenylene sulphide (PPS) thin films filled with molecules of different dyes were obtained by co-deposition in vacuum. The PTFE matrix prevented aggregation of dye molecules more strongly, than PPS matrix. During heating PTFE matrix kept the dye molecules in not aggregated state up to dye decomposition temperature. Dyes of all types, buried in the PTFE matrix, exhibited high stability toward actions of external factors: light, temperature, acids. KW - dye KW - PTF KW - PPS KW - nanocomposite KW - thin film KW - optical spectra KW - stability Y1 - 2014 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-5947 SN - 2374-8141 VL - 1 IS - 2 ER - TY - JOUR A1 - Bauer, Joachim A1 - Gutke, Marko A1 - Heinrich, Friedhelm A1 - Edling, Matthias A1 - Stoycheva, Vesela A1 - Kaltenbach, Alexander A1 - Burkhardt, Martin A1 - Gruenefeld, Martin A1 - Gamp, Matthias A1 - Gerhard, Christoph A1 - Steglich, Patrick A1 - Steffen, Sebastian A1 - Herzog, Michael A1 - Dreyer, Christian A1 - Schrader, Sigurd T1 - Novel UV-transparent 2-component polyurethane resin for chip-on-board LED micro lenses JF - Optical Materials Express N2 - In this work we present a novel optical polymer system based on polyurethane elastomer components, which combines excellent UV transparency with high thermal stability, good hardness, high surface tension and long pot life. The material looks very promising for encapsulation and microlensing applications for chip-on-board (CoB) light-emitting diodes (LED). The extinction coefficient k, refractive index n, and bandgap parameters were derived from transmission and reflection measurements in a wavelength range of 200-890 nm. Thermogravimetry and differential scanning calorimetry were used to provide glass transition and degradation temperatures. The surface tension was determined by means of contact angle measurements. As proof of concept, a commercial InGaN-CoB-LED is used to demonstrate the suitability of the new material for the production of microlenses. Y1 - 2020 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-13472 SN - 2159-3930 VL - 10 IS - 9 SP - 2085 EP - 2099 ER - TY - JOUR A1 - Minaev, Boris A1 - Jansson, Emil A1 - Ågren, Hans A1 - Schrader, Sigurd T1 - Theoretical study of phosphorescence in dye doped light emitting diodes JF - The Journal of Chemical Physics N2 - Phosphorescence of platinum(II) octaethyl porphyrin (PtOEP), which has been used in organic light emitting diodes to overcome the efficiency limit imposed by the formation of triplet excitons, is studied by time-dependent (TD) density functional theory (DFT). Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-9775 SN - 1089-7690 VL - 125 IS - 23 ER - TY - JOUR A1 - Lux, Helge A1 - Siemroth, Peter A1 - Sgarlata, Anna A1 - Prosposito, Paolo A1 - Schubert, Markus Andreas A1 - Casalboni, Mauro A1 - Schrader, Sigurd T1 - Synthesis of graphene-like transparent conductive films on dielectric substrates using a modified filtered vacuum arc system JF - Journal of Applied Physics N2 - Here, we present a reliable process to deposit transparent conductive films on silicon oxide, quartz, and sapphire using a solid carbon source. This layer consists of partially ordered graphene flakes with a lateral dimension of about 5 nm. The process does not require any catalytic metal and exploits a high current arc evaporation (Φ-HCA) to homogeneously deposit a layer of carbon on heated substrates. A gas atmosphere consisting of Argon or Argon/Hydrogen blend acting as a buffer influences the morphology of the growing film. scanning tunneling microscopy, transmission electron microscopy, and Raman spectra were used for a thorough characterization of the samples in order to optimize the growth parameters. The best carbon layers have a surface resistance of 5.7 × 103 Ω◻ whereas the optical transparency of the coatings is 88% with an excellent homogeneity over areas of several cm2. Such results are compatible with most semiconductor fabrication processes and make this method very promising for various industrial applications. Y1 - 2015 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-9738 SN - 1089-7550 VL - 117 IS - 19 ER - TY - JOUR A1 - Zesch, Christoph A1 - Finkelstein, Daniel A1 - Regehly, Martin A1 - Reif, Jürgen A1 - Schrader, Sigurd T1 - Efficient nanosecond barium nitrate Raman laser for the visible spectral range JF - Optics Express N2 - We report on the design and performance of two solid-state Raman lasers, pumped by a frequency-doubled Nd:YAG laser at 532 nm (8 ns FWHM, 10 Hz, up to 10 mJ), that generate either the first or second Stokes radiation with wavelengths of 563 nm and 598 nm. Barium nitrate crystals with a 1 cm² face area and lengths of 3 cm and 5 cm were used as the Raman-active medium in stable semi-spherical resonators. The Raman lasers produced first Stokes and second Stokes pulses, achieving pulse energies up to 2.3 mJ and conversion efficiencies up to 35% (first Stokes, 5 cm crystal) and 21% (second Stokes, 5 cm crystal). The output beams exhibit nearly Gaussian profiles with beam quality factors of M² = 1.67 and M² = 1.83, respectively. The proposed design and characterization demonstrated a Raman laser with high efficiency and superior beam quality. After subsequent frequency doubling, the output appears well dedicated for future differential absorption LiDAR (DIAL) applications. KW - Gaussian beam KW - laser source KW - Nd:YAG laser KW - Raman laser KW - solid state laser KW - ultraviolet laser Y1 - 2026 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-21320 VL - 34 IS - 4 SP - 6355 EP - 6363 PB - Optica ER - TY - JOUR A1 - Villasmunta, Francesco A1 - Heise, Patrick A1 - Breiter, Manuela A1 - Schrader, Sigurd A1 - Schenk, Harald A1 - Regehly, Martin A1 - Mai, Andreas T1 - Monolithically Integrated Optical Through-Silicon Waveguides for 3D Chip-to-Chip Photonic Interconnects JF - IEEE Journal of Selected Topics in Quantum Electronics N2 - The scaling limitations of electrical interconnects are driving the demand for efficient optical chip-to-chip links. We report the first monolithic integration of air-clad optical through-silicon waveguides in silicon, fabricated via Bosch and cryogenic deep reactive-ion etching. Rib, single-bridge, and double-bridge designs with 50 μm cores and up to 150 μm propagation lengths have been evaluated. Cryogenic-etched rib waveguides achieve the highest median transmission (66%, −1.80 dB), compared to Bosch-etched ribs (62%, −2.08 dB). Across all geometries, 3 dB alignment windows range from 9.3 μm to 49.2 μm, with Bosch-etched double-bridge waveguides providing the broadest tolerance. We show that geometric fidelity outweighs sidewall roughness for transmission and alignment in these large-core, multimode optical through-silicon waveguides. This technology provides a scalable, complementary metal-oxide semiconductor-compatible pathway toward 3D photonic interconnects. KW - optical waveguide KW - optical device fabrication KW - silicon KW - three-dimensional display KW - optical loss KW - optical interconnection KW - coupling KW - optical surface wave KW - optical coupling KW - coupler KW - silicon photonics KW - three-dimensional integrated circuit KW - through-silicon vias (TSV) Y1 - 2026 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-20828 VL - 32 IS - 2 PB - IEEE ER - TY - JOUR A1 - Steglich, Patrick A1 - Mai, Christian A1 - Villringer, Claus A1 - Dietzel, Birgit A1 - Bondarenko, Siegfried A1 - Ksianzou, Viachaslau A1 - Villasmunta, Francesco A1 - Zesch, Christoph A1 - Pulwer, Silvio A1 - Burger, Martin A1 - Bauer, Joachim A1 - Heinrich, Friedhelm A1 - Schrader, Sigurd A1 - Vitale, Francesco A1 - De Matteis, Fabio A1 - Prosposito, Paolo A1 - Casalboni, Mauro A1 - Mai, Andreas T1 - Silicon-organic hybrid photonics: an overview of recent advances, electro-optical effects and CMOS integration concepts JF - Journal of Physics: Photonics N2 - In recent decades, much research effort has been invested in the development of photonic integrated circuits, and silicon-on-insulator technology has been established as a reliable platform for highly scalable silicon-based electro-optical modulators. However, the performance of such devices is restricted by the inherent material properties of silicon. An approach to overcoming these deficiencies is to integrate organic materials with exceptionally high optical nonlinearities into a silicon-on-insulator photonic platform. Silicon–organic hybrid photonics has been shown to overcome the drawbacks of silicon-based modulators in terms of operating speed, bandwidth, and energy consumption. This work reviews recent advances in silicon–organic hybrid photonics and covers the latest improvements to single components and device concepts. Special emphasis is given to the in-device performance of novel electro-optical polymers and the use of different electro-optical effects, such as the linear and quadratic electro-optical effect, as well as the electric-field-induced linear electro-optical effect. Finally, the inherent challenges of implementing non-linear optical polymers on a silicon photonic platform are discussed and a perspective for future directions is given. Y1 - 2021 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-13882 SN - 2515-7647 VL - 3 IS - 2 ER - TY - JOUR A1 - Bauer, Joachim A1 - Fursenko, Oksana A1 - Marschmeyer, Steffen A1 - Heinrich, Friedhelm A1 - Villasmunta, Francesco A1 - Villringer, Claus A1 - Zesch, Christoph A1 - Schrader, Sigurd T1 - Spectroscopic reflectometry for characterization of Through Silicon Via profile of Bosch etching process JF - Journal of Vacuum Science & Technology B N2 - Through Silicon Via (TSV) technology is a key in 3D integration of circuits by the creation of interconnects using vias, which go through the full silicon wafer. Typically, a highly-selective Bosch Si etch process is used. It is characterized by a high etch rate at a high aspect ratio, whereby scallops on the sidewalls are generated. In this work, square via arrays with dimensions from 3 to 50 μm and up to 300 μm depth were fabricated and analyzed by spectroscopic reflectometry. The reflectometric data are compared to simulations by a novel theoretical approach. In order to simulate the reflectance spectra of TSV arrays, a combination of 2D and 3D rigorous coupled wave analysis was applied. Besides the via depth, the sidewall angle and the corner radius of the bottom profile were considered in the model. The general requirements on spectral resolution in TSV metrology are discussed. Y1 - 2019 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-16093 VL - 37 IS - 6 PB - American Vacuum Society (AVS) ER - TY - JOUR A1 - Steglich, Patrick A1 - Mai, Christian A1 - Villringer, Claus A1 - Pulwer, Silvio A1 - Casalboni, Mauro A1 - Schrader, Sigurd A1 - Mai, Andreas T1 - Quadratic electro-optic effect in silicon-organic hybrid slot-waveguides JF - Optics Letters N2 - This Letter reports on the quadratic electro-optic effect of polymers, observed in a silicon slot-waveguide at low voltages. We demonstrate that in narrow slots, the electro-optic response with respect to refractive index change is strong enough for on-chip wavelength tuning and intensity modulation using voltages as low as 1 V. A silicon slot-waveguide embedded by a nonlinear optical polymer, consisting of the dye Disperse Red 1 in poly(methyl methacrylate), serves as the phase shifter in a racetrack ring resonator. As deduced from the experimental data, the third-order susceptibility of the utilized electro-optic polymer is about 2·10−19 m2/V2. The demonstrated low-voltage operation and inherently thermal stability show the potential for silicon-organic hybrid devices using the quadratic electro-optic effect. Y1 - 2018 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-12148 SN - 1539-4794 VL - 43 IS - 15 ER -