TY - JOUR A1 - Lux, Helge A1 - Siemroth, Peter A1 - Sgarlata, Anna A1 - Prosposito, Paolo A1 - Schubert, Markus Andreas A1 - Casalboni, Mauro A1 - Schrader, Sigurd T1 - Synthesis of graphene-like transparent conductive films on dielectric substrates using a modified filtered vacuum arc system JF - Journal of Applied Physics N2 - Here, we present a reliable process to deposit transparent conductive films on silicon oxide, quartz, and sapphire using a solid carbon source. This layer consists of partially ordered graphene flakes with a lateral dimension of about 5 nm. The process does not require any catalytic metal and exploits a high current arc evaporation (Φ-HCA) to homogeneously deposit a layer of carbon on heated substrates. A gas atmosphere consisting of Argon or Argon/Hydrogen blend acting as a buffer influences the morphology of the growing film. scanning tunneling microscopy, transmission electron microscopy, and Raman spectra were used for a thorough characterization of the samples in order to optimize the growth parameters. The best carbon layers have a surface resistance of 5.7 × 103 Ω◻ whereas the optical transparency of the coatings is 88% with an excellent homogeneity over areas of several cm2. Such results are compatible with most semiconductor fabrication processes and make this method very promising for various industrial applications. Y1 - 2015 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-9738 SN - 1089-7550 VL - 117 IS - 19 ER -