TY - JOUR A1 - Lux, Helge A1 - Edling, Matthias A1 - Lucci, Massimiliano A1 - Kitzmann, Julia A1 - Villringer, Claus A1 - Siemroth, Peter A1 - De Matteis, Fabio A1 - Schrader, Sigurd T1 - The Role of Substrate Temperature and Magnetic Filtering for DLC by Cathodic Arc Evaporation JF - Coatings N2 - Diamond-like carbon (DLC) films were deposited using two different types of high current arc evaporation. The first process used a magnetic particle filter to remove droplets from the plasma. For the second process, the samples were put into a metallic cage which was placed directly above the plasma source. For both processes, we varied the substrate temperature from 21 to 350 °C in order to investigate the temperature effect. The samples were characterized using SEM, AFM, XPS, Raman Spectroscopy, Ellipsometry, Photometry, and Nano Indentation in order to compare both methods of deposition and provide a careful characterization of such DLC films. We found that the sp3 content and the hardness can be precisely adjusted by changing the substrate temperature. Furthermore, in the case of unfiltered deposition, the optical constants can be shifted in the direction of higher absorbance in order to produce black and hard carbon coatings. KW - DLC KW - ta-C KW - arc evaporation KW - substrate temperature KW - hardness KW - optical constant KW - ellipsometry Y1 - 2019 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-12295 SN - 2079-6412 VL - 9 IS - 5 SP - 345 ER -