TY - CHAP A1 - Lebek, Werner A1 - Heyroth, Frank A1 - Syrowatka, Frank A1 - Villringer, Claus A1 - Goerlitz, Sylvia A1 - Laufer, Jan T1 - Evaluation of fabrication methods for Fabry-Perot polymer film ultrasound sensors T2 - Opto-Acoustic Methods and Applications in Biophotonics VI N2 - Fabry-Pèrot (FP) interferometer sensors enable highly sensitive backward mode acoustic detection in Photoacoustic (PA) imaging. They are transparent to the excitation wavelength, can be placed directly next to the PA source, and offer a broadband frequency response and high acoustic sensitivity. PA tomography using parallelized detection requires high spatial uniformity of the optical and acoustic properties, which can be hampered by contaminations during fabrication that lead to the formation of inhomogeneities and artefacts. The quality and homogeneity of the dielectric and polymer layers have a direct effect on the maximum optical phase sensitivity, and hence acoustic sensitivity. In this study, cross-sectional images of FP sensors were obtained using focused ion beam milling and ultramicrotomy followed by Scanning Electron Microscopy (SEM) and Transmission Electron Microscopy (TEM) to evaluate different fabrication methods. KW - photoacoustic imaging KW - Fabry-Perot sensor KW - parylene-C KW - cocus ion beam KW - electron microscopy Y1 - 2023 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-17864 ER -