TY - CHAP A1 - Rymarczyk, Joanna A1 - Czerwosz, Elzbieta A1 - Richter, Asta T1 - FEM modelling of nanoindentation experiment for nanostructural Me-carbon film (Me = Pd, Ni) T2 - Proc. SPIE 7502, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2009 N2 - This work presents a comparison of numerical simulation and experimental data for nanoindentation studies of nanostructural Me-carbonaceous films (where Me = Pd or Ni). Films containing palladium or nickel nanograins embedded in a carbonaceous matrix were synthesized by a PVD process. The topography of films was characterized by AFM and the mechanical properties were analyzed by nanoindentation. Nanoindentation experiments were performed with a tip made of diamond with a shape of a 90° cube corner three-sided pyramid in a Hysitron Triboscope. The finite element method (FEM) was used to simulate the indentation experiment in such heterogeneous material on nanoscale. KW - nanoindentation KW - nano-crystal KW - Ni KW - Pd KW - carbon KW - AFM KW - hardness KW - FEM Y1 - 2009 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:kobv:526-opus4-14837 ER -