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<export-example>
  <doc>
    <id>1529</id>
    <completedYear>2016</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>1517</pageFirst>
    <pageLast>1527</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>Society of Photo-Optical Instrumentation Engineers (SPIE)</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">On the origin and removal of interference patterns in coated multimode fibres</title>
    <abstract language="eng">In this study, we present the experimental investigations on interference patterns, such as those already reported in VIMOS-IFU, and up to now no appropriate explanation has been presented. These interference patterns are produced in multimode fibres coated with acrylate or polyimide, which is the preferred coating material for the fibres used in IFUs. Our experiments show that, under specific conditions, cladding modes interact with the coating and produce interference. Our results show that the conditions at which the fibre is held during data acquisition has an impact in the output spectrum. Altering the positioning conditions of the fibre leads to the changes into the interference pattern, therefore, fibres should be carefully manipulated in order to minimise this potential problem and improve the performance of these instruments. Finally we present a simple way of predicting and modelling this interference produced from the visible to the near infrared spectra. This model can be included in the data reduction pipeline in order to remove the interference patterns.&#13;
&#13;
These results should be of interest for the optimisation of the data reduction pipelines of instruments using optical fibres. Considering these results will benefit innovations and developments of high performance fibre systems.</abstract>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-15295</identifier>
    <enrichment key="opus.import.date">2021-09-17T08:22:28+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">sword</enrichment>
    <enrichment key="opus.import.file">filename=phpQBrpHM</enrichment>
    <enrichment key="opus.import.checksum">efe78858a43b19b2d60cf742c3c833f9</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.2233676</enrichment>
    <enrichment key="CopyrightInfo">Copyright 2016 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.</enrichment>
    <enrichment key="SourceTitle">Yazmin Padilla Michel, Silvio Pulwer, Pouneh Saffari, Viachaslau Ksianzou, and Sigurd Schrader "On the origin and removal of interference patterns in coated multimode fibres", Proc. SPIE 9912, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation II, 991255 (22 July 2016); https://doi.org/10.1117/12.2233676</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Yazmin Padilla-Michel</author>
    <author>Silvio Pulwer</author>
    <author>Pouneh Saffari</author>
    <author>Viachaslau Ksianzou</author>
    <author>Sigurd Schrader</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>instrumentation</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>multimode fibre</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>bending loss</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>fringing</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>interference</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>coating material</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>data reduction</value>
    </subject>
    <collection role="ddc" number="620">Ingenieurwissenschaften und zugeordnete Tätigkeiten</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="Import" number="import">Import</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1529/991255.pdf</file>
  </doc>
  <doc>
    <id>1530</id>
    <completedYear>2016</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>51</pageFirst>
    <pageLast>56</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>SPIE</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Triangulation-based 3D surveying borescope</title>
    <abstract language="eng">In this work, a measurement concept based on triangulation was developed for borescopic 3D-surveying of surface defects. The integration of such measurement system into a borescope environment requires excellent space utilization. The triangulation angle, the projected pattern, the numerical apertures of the optical system, and the viewing angle were calculated using partial coherence imaging and geometric optical raytracing methods. Additionally, optical aberrations and defocus were considered by the integration of Zernike polynomial coefficients. The measurement system is able to measure objects with a size of 50 μm in all dimensions with an accuracy of ± 5 μm. To manage the issue of a low depth of field while using an optical high resolution system, a wavelength dependent aperture was integrated. Thereby, we are able to control depth of field and resolution of the optical system and can use the borescope in measurement mode with high resolution and low depth of field or in inspection mode with low resolution and higher depth of field. First measurements of a demonstrator system are in good agreement with our simulations.</abstract>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-15307</identifier>
    <enrichment key="opus.import.date">2021-09-17T08:47:18+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">sword</enrichment>
    <enrichment key="opus.import.file">filename=phpDjUR2J</enrichment>
    <enrichment key="opus.import.checksum">bfe2033b55e7dfd0ecc0475870d4f97e</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.2225203</enrichment>
    <enrichment key="CopyrightInfo">Copyright 2016 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.</enrichment>
    <enrichment key="SourceTitle">S. Pulwer, P. Steglich, C. Villringer, J. Bauer, M. Burger, M. Franz, K. Grieshober, F. Wirth, J. Blondeau, J. Rautenberg, S. Mouti, and S. Schrader "Triangulation-based 3D surveying borescope", Proc. SPIE 9890, Optical Micro- and Nanometrology VI, 989009 (26 April 2016); https://doi.org/10.1117/12.2225203</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Silvio Pulwer</author>
    <author>Patrick Steglich</author>
    <author>Claus Villringer</author>
    <author>Joachim Bauer</author>
    <author>Martin Burger</author>
    <author>M. Franz</author>
    <author>K. Grieshober</author>
    <author>F. Wirth</author>
    <author>J. Blondeau</author>
    <author>J. Rautenberg</author>
    <author>S. Mouti</author>
    <author>Sigurd Schrader</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>borescope</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>3D measurement</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>triangulation</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>lens design</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>calibration</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>defect</value>
    </subject>
    <collection role="ddc" number="620">Ingenieurwissenschaften und zugeordnete Tätigkeiten</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="Import" number="import">Import</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1530/989009.pdf</file>
  </doc>
  <doc>
    <id>1536</id>
    <completedYear>2020</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>SPIE</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Dynamic pattern generation by singlemode fibers for endoscopic 3D measurement systems</title>
    <abstract language="eng">This work presents experimental and simulation results of a 3D measurement concept based on fiber-optic interference pattern generation. A demonstrator system which is able to adjust different optical and mechanical parameters is described. The results of parameter variation studies are discussed along with possible applications in the field of micro-optical 3D measurement systems like endoscopes. The experiments were prepared with different structures with various scattering properties. To implement that approach into a micro-optical 3D measurement system, the combination of distance variation between the fibers and a controlled phase shift introduced by a retarder can be used to design the system versatile.</abstract>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-15364</identifier>
    <enrichment key="opus.import.date">2021-09-17T11:24:54+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">sword</enrichment>
    <enrichment key="opus.import.file">filename=php3kHmfo</enrichment>
    <enrichment key="opus.import.checksum">1097951ba9d9464fa0628f3f6c593379</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.2543526</enrichment>
    <enrichment key="CopyrightInfo">Copyright 2020 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.</enrichment>
    <enrichment key="SourceTitle">Silvio Pulwer, Daniel Jahns, Claus Villringer, and Sigurd Schrader "Dynamic pattern generation by singlemode fibers for endoscopic 3D measurement systems", Proc. SPIE 11293, MOEMS and Miniaturized Systems XIX, 112930F (28 February 2020); https://doi.org/10.1117/12.2543526</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Silvio Pulwer</author>
    <author>Daniel Jahns</author>
    <author>Claus Villringer</author>
    <author>Sigurd Schrader</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>endoscope</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>3D measurement</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>phase shift</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>fiber</value>
    </subject>
    <collection role="ddc" number="620">Ingenieurwissenschaften und zugeordnete Tätigkeiten</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="Import" number="import">Import</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1536/112930F.pdf</file>
  </doc>
  <doc>
    <id>1533</id>
    <completedYear>2018</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>217</pageFirst>
    <pageLast>222</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>SPIE</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Parallelised photoacoustic signal acquisition using a Fabry-Perot sensor and a camera-based interrogation scheme</title>
    <abstract language="eng">Tomographic photoacoustic (PA) images acquired using a Fabry-Perot (FP) based scanner offer high resolution and image fidelity but can result in long acquisition times due to the need for raster scanning. To reduce the acquisition times, a parallelised camera-based PA signal detection scheme is developed. The scheme is based on using a sCMOScamera and FPI sensors with high homogeneity of optical thickness. PA signals were acquired using the camera-based setup and the signal to noise ratio (SNR) was measured. A comparison of the SNR of PA signal detected using 1) a photodiode in a conventional raster scanning detection scheme and 2) a sCMOS camera in parallelised detection scheme is made. The results show that the parallelised interrogation scheme has the potential to provide high speed PA imaging.</abstract>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-15335</identifier>
    <enrichment key="opus.import.date">2021-09-17T10:53:30+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">sword</enrichment>
    <enrichment key="opus.import.file">filename=phpfGvKAj</enrichment>
    <enrichment key="opus.import.checksum">2a8b53435a02c891ed1e82cc5b4020b7</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.2290223</enrichment>
    <enrichment key="CopyrightInfo">Copyright 2018 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.</enrichment>
    <enrichment key="SourceTitle">T. Saeb Gilani, C. Villringer, E. Zhang, H. Gundlach, J. Buchmann, S. Schrader, and J. Laufer "Parallelised photoacoustic signal acquisition using a Fabry-Perot sensor and a camera-based interrogation scheme", Proc. SPIE 10494, Photons Plus Ultrasound: Imaging and Sensing 2018, 1049431 (20 February 2018); https://doi.org/10.1117/12.2290223</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Taravat Saeb Gilani</author>
    <author>Claus Villringer</author>
    <author>Edward Zhang</author>
    <author>H. Gundlach</author>
    <author>Jens Buchmann</author>
    <author>Sigurd Schrader</author>
    <author>Jan Laufer</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>photoacoustic imaging</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>parallelised signal acquisition</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Fabry-Perot polymer film sensor</value>
    </subject>
    <collection role="ddc" number="620">Ingenieurwissenschaften und zugeordnete Tätigkeiten</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="Import" number="import">Import</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1533/1049431.pdf</file>
  </doc>
  <doc>
    <id>1376</id>
    <completedYear>2019</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>Society of Photo-Optical Instrumentation Engineers (SPIE)</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Development of tuneable Fabry-Pérot sensors for parallelised photoacoustic signal acquisition</title>
    <abstract language="eng">Fabry-Pérot (FP) sensors have enabled high resolution 3D photoacoustic (PA) imaging in backward mode. However, raster-scanning of the interrogation laser beam across the sensor can result in slow 3D image acquisition. To overcome this limitation, parallelized PA signal acquisition can be used for which FP sensors with uniform optical thickness are required. In this work, the optical thickness is tuned a) irreversibly through the use of a photopolymer host matrix and b) actively using embedded electro-optic (EO) chromophores. Polymer spacers (5 μm) were deposited using spin coating and sandwiched between two dielectric mirrors and transparent ITO electrodes. The employed polymer guest-host system consists of an EO chromophore (2-methyl-4-nitroaniline) and poly(vinyl cinnamate). EO tuneability was induced using contact poling and a tuneability of 68 pm was demonstrated. The optical thickness was homogenised by raster scanning a UV beam whilst varying the exposure time across a 4 mm2 detection aperture.</abstract>
    <parentTitle language="eng">Proc. SPIE 10878, Photons Plus Ultrasound: Imaging and Sensing 2019, 108780M (8 March 2019)</parentTitle>
    <identifier type="issn">1996-756X</identifier>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-13769</identifier>
    <enrichment key="opus.source">publish</enrichment>
    <enrichment key="CopyrightInfo">Copyright (2019) Society of Photo‑Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited.</enrichment>
    <enrichment key="SourceTitle">Claus Villringer, Taravat S. Gilani, Edward Zhang, Silvio Pulwer, Patrick Steglich, Sigurd Schrader, and Jan Laufer "Development of tuneable Fabry-Pérot sensors for parallelised photoacoustic signal acquisition", Proc. SPIE 10878, Photons Plus Ultrasound: Imaging and Sensing 2019, 108780M (8 March 2019); https://doi.org/10.1117/12.2509437</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.2509437</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Claus Villringer</author>
    <author>Taravat Saeb Gilani</author>
    <author>Edward Zhang</author>
    <author>Silvio Pulwer</author>
    <author>Patrick Steglich</author>
    <author>Sigurd Schrader</author>
    <author>Jan Laufer</author>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1376/108780M.pdf</file>
  </doc>
  <doc>
    <id>1375</id>
    <completedYear>2017</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Very high aspect ratio through silicon via reflectometry</title>
    <abstract language="eng">Through Silicon Via (TSV) technology is a key feature of new 3D integration of circuits by creation of interconnections using vias, which go through the silicon wafer. Typically, the highly-selective Bosch Si etch process, characterized by a high etch rate and high aspect ratio and forming of scallops on the sidewalls is used. As presented in this paper, we have developed an experimental setup and a respective evaluation algorithm for the control and monitoring of very high aspect ratio TSV profiles by spectroscopic reflectometry. For this purpose square via arrays with lateral dimension from 3 to 10 μm were fabricated by a Bosch etch process and analyzed by our setup. By exploiting interference and diffraction effects of waves reflected from the top and bottom surfaces as well as from the side walls of the TSV patterns, the measurements provided etch depths, CD values and scallop periods. The results were compared with data obtained by a commercial wafer metrology tool. Aspect ratios of up to 35:1 were safely evaluable by our setup.</abstract>
    <parentTitle language="eng">Proceedings of SPIE</parentTitle>
    <identifier type="issn">1996-756X</identifier>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-13758</identifier>
    <enrichment key="opus.source">publish</enrichment>
    <enrichment key="CopyrightInfo">Copyright (2017) Society of Photo‑Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited.</enrichment>
    <enrichment key="SourceTitle">J. Bauer, F. Heinrich, O. Fursenko, S. Marschmeyer, A. Bluemich, S. Pulwer, P. Steglich, C. Villringer, A. Mai, and S. Schrader "Very high aspect ratio through silicon via reflectometry", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103293J (26 June 2017); https://doi.org/10.1117/12.2269957</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.2269957</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Joachim Bauer</author>
    <author>Friedhelm Heinrich</author>
    <author>Oksana Fursenko</author>
    <author>Steffen Marschmeyer</author>
    <author>Adrian Bluemich</author>
    <author>Silvio Pulwer</author>
    <author>Patrick Steglich</author>
    <author>Claus Villringer</author>
    <author>Andreas Mai</author>
    <author>Sigurd Schrader</author>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1375/103293J.pdf</file>
  </doc>
  <doc>
    <id>1347</id>
    <completedYear>2020</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>2085</pageFirst>
    <pageLast>2099</pageLast>
    <pageNumber/>
    <edition/>
    <issue>9</issue>
    <volume>10</volume>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Novel UV-transparent 2-component polyurethane resin for chip-on-board LED micro lenses</title>
    <abstract language="eng">In this work we present a novel optical polymer system based on polyurethane elastomer components, which combines excellent UV transparency with high thermal stability, good hardness, high surface tension and long pot life. The material looks very promising for encapsulation and microlensing applications for chip-on-board (CoB) light-emitting diodes (LED). The extinction coefficient k, refractive index n, and bandgap parameters were derived from transmission and reflection measurements in a wavelength range of 200-890 nm. Thermogravimetry and differential scanning calorimetry were used to provide glass transition and degradation temperatures. The surface tension was determined by means of contact angle measurements. As proof of concept, a commercial InGaN-CoB-LED is used to demonstrate the suitability of the new material for the production of microlenses.</abstract>
    <parentTitle language="eng">Optical Materials Express</parentTitle>
    <identifier type="issn">2159-3930</identifier>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-13472</identifier>
    <enrichment key="opus.source">publish</enrichment>
    <enrichment key="CopyrightInfo">© 2020 Optical Society of America. Users may use, reuse, and build upon the article, or use the article for text or data mining, so long as such uses are for non-commercial purposes and appropriate attribution is maintained. All other rights are reserved.</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1364/OME.393844</enrichment>
    <licence>OSA Open Access Publishing Agreement</licence>
    <author>Joachim Bauer</author>
    <author>Marko Gutke</author>
    <author>Friedhelm Heinrich</author>
    <author>Matthias Edling</author>
    <author>Vesela Stoycheva</author>
    <author>Alexander Kaltenbach</author>
    <author>Martin Burkhardt</author>
    <author>Martin Gruenefeld</author>
    <author>Matthias Gamp</author>
    <author>Christoph Gerhard</author>
    <author>Patrick Steglich</author>
    <author>Sebastian Steffen</author>
    <author>Michael Herzog</author>
    <author>Christian Dreyer</author>
    <author>Sigurd Schrader</author>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="Funding" number="">DFG-geförderter Publikationsfonds</collection>
    <collection role="green_open_access" number="1">Gold Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1347/ome-10-9-2085.pdf</file>
  </doc>
  <doc>
    <id>1205</id>
    <completedYear>2015</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>585</volume>
    <type>conferenceobject</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Analysis of thermally stimulated processes in new phenanthroline derivatives suitable for optoelectronic devices</title>
    <abstract language="eng">Thermally stimulated processes have been studied in thin films of phenanthroline derives to describe the states that had been localized. Ultraviolet Photoelectron Spectroscopy had checked out before thin films of new pyrrolo[l,2-a][l,10] phenanthroline derivatives [1], in order to further applications in optoelectronic devices. The investigated compounds have an electronic band structure which is due to the substituent (R=NO2, Cl) induced transformations of molecular orbitals. Thermally stimulated discharge currents (TSDC) attested dipolar and charge transport mechanisms. Each TSDC peak has been assigned to elementary processes that are different utilizing in addition dielectric spectroscopy (DES), and the mean trap depths have been approximated from thermally stimulated luminescence (TSL) curves.</abstract>
    <parentTitle language="eng">Journal of Physics: Conference Series (JPCONF)</parentTitle>
    <identifier type="issn">1742-6596</identifier>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-12050</identifier>
    <enrichment key="SourceTitle">Marius Prelipceanu et al 2015 J. Phys.: Conf. Ser.585 012011. https://doi.org/10.1088/1742-6596/585/1/012011</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1088/1742-6596/585/1/012011</enrichment>
    <licence>Creative Commons - CC BY 3.0 - Namensnennung 3.0 Unported</licence>
    <author>Marius Prelipceanu</author>
    <author>Lucian Cojocariu</author>
    <author>Adrian Graur</author>
    <author>Sigurd Schrader</author>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1205/Prelipceanu_2015.pdf</file>
  </doc>
  <doc>
    <id>330</id>
    <completedYear>2014</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>deu</language>
    <pageFirst>27</pageFirst>
    <pageLast>32</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>18</volume>
    <type>articlewildau</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>2014-10-16</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="deu">Analyse komplexer biologischer Proben mittels oberflächenverstärkter Ramanspektroskopie (SERS)</title>
    <abstract language="deu">Diese Studie beschäftigt sich mit dem Nachweis biologischer Proben mit Hilfe der Raman-Mikroskopie. Um ausreichende Signalintensitäten auch bei niedrigen Konzentrationen zu erhalten, wurde insbesondere der Effekt der oberflächenverstärkten Raman-Streuung (SERS) näher untersucht. Als Proben dienten DNA aus Hering-Sperma und das Protein Albumin. Zur Verstärkung des Raman-Spektrums wurden zwei unterschiedliche Methoden verwendet. Zum Einen wurden in einem chemischen Reduktionsprozess Nanosilberpartikel hergestellt und den biologischen Proben zugemischt. Zum Anderen wurden mit Hilfe laserangeregter periodischer Oberflächenstrukturierung (LIPSS) erzeugte nanostrukturierte Silberoberflächen als Substrate für die Proben verwendet. Diese Methode wurde bislang nicht für die SERS-Analyse biologischer Proben eingesetzt. Erste hier präsentierte Messungen zeigen, dass beide Verfahren signifikante SERS-Verstärkungen liefern und potentiell leistungsstarke Methoden für die zerstörungsfreie Analyse biologischer Proben darstellen.</abstract>
    <parentTitle language="deu">Wissenschaftliche Beiträge 2014</parentTitle>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-3300</identifier>
    <identifier type="doi">10.15771/0949-8214_2014_1_3</identifier>
    <identifier type="issn">0949-8214</identifier>
    <enrichment key="ZSTiteliD">16238</enrichment>
    <licence>Creative Commons - CC BY-NC-ND 3.0 DE - Namensnennung - Nicht-kommerziell - Keine Bearbeitung 3.0 Deutschland</licence>
    <author>Janine Lange</author>
    <author>Hamza Messaoudi</author>
    <author>Susanta Kumar Das</author>
    <author>Rüdiger Grunwald</author>
    <author>Sigurd Schrader</author>
    <author>Marcus Frohme</author>
    <author>Friedhelm Heinrich</author>
    <collection role="ddc" number="541">Physikalische Chemie</collection>
    <collection role="ddc" number="543">Analytische Chemie</collection>
    <collection role="Publikationen_der_TH_Wildau" number="">Wissenschaftliche Beiträge</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="green_open_access" number="3">Diamond Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/330/03_Analyse_komplexer_biologischer.pdf</file>
  </doc>
  <doc>
    <id>533</id>
    <completedYear>2016</completedYear>
    <publishedYear>2016</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>45</pageFirst>
    <pageLast>48</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>20</volume>
    <type>articlewildau</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>2016-03-21</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Advanced Nanophotonics: Silicon-Organic Hybrid Technology</title>
    <abstract language="eng">Integrated photonic devices have gained increasing research interests. Especially silicon photonics have become very attractive for various optical applications. Using silicon-on-insulator as a material platform provides the ability to fabricate photonic devices with electronic devices on a single chip. Driven by substantial research investments, the integration of photonic devices on silicon-on-insulator substrates has reached a degree of maturity that already permits industrial adoption. However, silicon has the disadvantage of linear electro-optical effects, and, therefore, advanced modulation formats are difficult to realize when using silicon-based high-speed modulators. Hence, a new approach was proposed: the silicon-organic hybrid technology. This technology is a viable extension of the silicon-on-insulator material system for efficient high-speed modulation. We herewith present our theoretical and experimental investigations of the silicon-organic hybrid slot-waveguide ring resonator. The advanced device design is described in detail, which allows using both, the efficient silicon-on-insulator strip-waveguides and the silicon-organic hybrid slot-waveguides in single ring resonator. For the first time, we report the transmission spectra of such a resonator covered with an electro-optical polymer.</abstract>
    <abstract language="deu">Integrierte photonische Bauelemente werden in der Forschung immer bedeutender. Besonders die Siliziumphotonik ist für verschiedene optische Anwendungen sehr attraktiv. Die Verwendung von Silizium-auf-Isolator-Materialsystemen bietet die Möglichkeit, photonische Bauelemente mit elektronischen Geräten auf einem einzelnen Chip zu entwickeln. Durch erhebliche Forschungsinvestitionen hat die photonische Integration auf Silizium-auf-Isolator-Substraten einen Reifegrad, der bereits Industriemaßstäben genügt. Jedoch hat Silizium keinen linearen elektrooptischen Effekt und damit sind moderne Modulationsformate nur schwierig zu realisieren. Daher wird seit eingen Jahren ein neuer Ansatz, die Silizium-Organik Hybridtechnologie, verfolgt. Diese Technologie ist eine tragfähige Ausdehnung des Silizium-auf-Isolator-Materialsystems für eine effiziente Hochgeschwindigkeitsmodulation und optische Signalverarbeitung. In diesem Artikel präsentieren wir unsere theoretischen und experimentellen Untersuchungen zu einem Silizium-Organik Hybrid Ringresonator. Das Design und die Herstellung des neuartigen nanophotonischen Bauelements werden im Detail beschrieben. Der demonstrierte Ringresonator kombiniert die Vorteile zweier verschiedener Wellenleiterarten in einem einzelnen Ring, dem verlustarmen Kanal-Wellenleiter und dem Silizium-organischen Hybridschlitzwellenleiter. Wir demonstrieren erstmals ein Transmissionsspektrum eines solchen Ringresonators, der mit einem elektro-optischen Polymer beschichtet ist.</abstract>
    <parentTitle language="eng">Wissenschaftliche Beiträge 2016</parentTitle>
    <identifier type="issn">0949-8214</identifier>
    <identifier type="doi">10.15771/0949-8214_2016_1_6</identifier>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-5337</identifier>
    <enrichment key="ZSTiteliD">16238</enrichment>
    <licence>Creative Commons - CC BY-NC-ND 3.0 DE - Namensnennung - Nicht-kommerziell - Keine Bearbeitung 3.0 Deutschland</licence>
    <author>Patrick Steglich</author>
    <author>Claus Villringer</author>
    <author>Silvio Pulwer</author>
    <author>Joachim Bauer</author>
    <author>Friedhelm Heinrich</author>
    <author>Mauro Casalboni</author>
    <author>Sigurd Schrader</author>
    <collection role="ddc" number="535">Licht, Infrarot- und Ultraviolettphänomene</collection>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="Publikationen_der_TH_Wildau" number="">Wissenschaftliche Beiträge</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="green_open_access" number="3">Diamond Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/533/Advanced_Nanophotonics.pdf</file>
  </doc>
  <doc>
    <id>1373</id>
    <completedYear>2020</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>1</pageFirst>
    <pageLast>5</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>Materials Research Forum LLC</publisherName>
    <publisherPlace>Millersville, PA</publisherPlace>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Characterization and Tests of Different Mach-Zehnder Silicon Photonic Modulator Configurations</title>
    <abstract language="eng">We designed and produced an integrated silicon photonic circuit, in a single chip with IHP SG25H4_EPIC 0.25 µm technology. A Mach-Zehnder interferometer with an alternative shape for better integration, together with a standard-shape Mach-Zehnder interferometer have been realized. In this work, preliminary results of comparative performance measurements between the two Mach-Zehnder interferometer are shown.</abstract>
    <parentTitle language="eng">Photonics and Photoactive Materials</parentTitle>
    <identifier type="isbn">978-1-64490-071-0</identifier>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-13731</identifier>
    <enrichment key="opus.source">publish</enrichment>
    <enrichment key="SourceTitle">Davide Badoni, Vincenzo Bonaiuto, Mauro Casalboni, Fabio De Matteis, Giovanni Di Giuseppe, Luca Frontini, Roberto Gunnella, Valentino Liberali, Andreas Mai, Giovanni Paoluzzi, Paolo Prosposito, Andrea Salamon, Gaetano Salina, Fausto Sargeni, Sigurd Schrader, Alberto Stabile, Patrick Steglich, Characterization and Tests of Different Mach-Zehnder Silicon Photonic Modulator Configurations, Materials Research Proceedings, Vol. 16, pp 1-5, 2020</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.21741/9781644900710-1</enrichment>
    <licence>Creative Commons - CC BY 3.0 - Namensnennung 3.0 Unported</licence>
    <author>Davide Badoni</author>
    <author>Vincenzo Bonaiuto</author>
    <author>Mauro Casalboni</author>
    <author>Fabio De Matteis</author>
    <author>Giovanni Di Giuseppe</author>
    <author>Luca Frontini</author>
    <author>Roberto Gunnella</author>
    <author>Valentino Liberali</author>
    <author>Andreas Mai</author>
    <author>Giovanni Paoluzzi</author>
    <author>Paolo Prosposito</author>
    <author>Andrea Salamon</author>
    <author>Gaetano Salina</author>
    <author>Fausto Sargeni</author>
    <author>Sigurd Schrader</author>
    <author>Alberto Stabile</author>
    <author>Patrick Steglich</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>CMOS</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Mach-Zehnder</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>VLSI</value>
    </subject>
    <collection role="ddc" number="620">Ingenieurwissenschaften und zugeordnete Tätigkeiten</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1373/1.pdf</file>
  </doc>
  <doc>
    <id>973</id>
    <completedYear>2015</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue>19</issue>
    <volume>117</volume>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Synthesis of graphene-like transparent conductive films on dielectric substrates using a modified filtered vacuum arc system</title>
    <abstract language="eng">Here, we present a reliable process to deposit transparent conductive films on silicon oxide, quartz, and sapphire using a solid carbon source. This layer consists of partially ordered graphene flakes with a lateral dimension of about 5 nm. The process does not require any catalytic metal and exploits a high current arc evaporation (Φ-HCA) to homogeneously deposit a layer of carbon on heated substrates. A gas atmosphere consisting of Argon or Argon/Hydrogen blend acting as a buffer influences the morphology of the growing film. scanning tunneling microscopy, transmission electron microscopy, and Raman spectra were used for a thorough characterization of the samples in order to optimize the growth parameters. The best carbon layers have a surface resistance of 5.7 × 103 Ω◻ whereas the optical transparency of the coatings is 88% with an excellent homogeneity over areas of several cm2. Such results are compatible with most semiconductor fabrication processes and make this method very promising for various industrial applications.</abstract>
    <parentTitle language="eng">Journal of Applied Physics</parentTitle>
    <identifier type="issn">1089-7550</identifier>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-9738</identifier>
    <enrichment key="SourceTitle">The following article appeared in Lux et al., J. Appl. Phys. 117, 195304 (2015) and may be found at http://dx.doi.org/10.1063/1.4921448.</enrichment>
    <enrichment key="CopyrightInfo">This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing.</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1063/1.4921448</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Helge Lux</author>
    <author>Peter Siemroth</author>
    <author>Anna Sgarlata</author>
    <author>Paolo Prosposito</author>
    <author>Markus Andreas Schubert</author>
    <author>Mauro Casalboni</author>
    <author>Sigurd Schrader</author>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/973/10.1063-1.4921448.pdf</file>
  </doc>
  <doc>
    <id>2132</id>
    <completedYear>2026</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>6355</pageFirst>
    <pageLast>6363</pageLast>
    <pageNumber/>
    <edition/>
    <issue>4</issue>
    <volume>34</volume>
    <type>article</type>
    <publisherName>Optica</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Efficient nanosecond barium nitrate Raman laser for the visible spectral range</title>
    <abstract language="eng">We report on the design and performance of two solid-state Raman lasers, pumped by a frequency-doubled Nd:YAG laser at 532 nm (8 ns FWHM, 10 Hz, up to 10 mJ), that generate either the first or second Stokes radiation with wavelengths of 563 nm and 598 nm. Barium nitrate crystals with a 1 cm² face area and lengths of 3 cm and 5 cm were used as the Raman-active medium in stable semi-spherical resonators. The Raman lasers produced first Stokes and second Stokes pulses, achieving pulse energies up to 2.3 mJ and conversion efficiencies up to 35% (first Stokes, 5 cm crystal) and 21% (second Stokes, 5 cm crystal). The output beams exhibit nearly Gaussian profiles with beam quality factors of M² = 1.67 and M² = 1.83, respectively. The proposed design and characterization demonstrated a Raman laser with high efficiency and superior beam quality. After subsequent frequency doubling, the output appears well dedicated for future differential absorption LiDAR (DIAL) applications.</abstract>
    <parentTitle language="eng">Optics Express</parentTitle>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-21320</identifier>
    <enrichment key="opus.import.date">2026-02-18T07:44:56+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">sword</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1364/OE.580000</enrichment>
    <enrichment key="SourceTitle">Christoph Zesch, Daniel Finkelstein, Martin Regehly, Jürgen Reif, and Sigurd Schrader, "Efficient nanosecond barium nitrate Raman laser for the visible spectral range," Opt. Express 34, 6355-6363 (2026)</enrichment>
    <enrichment key="opus.doi.autoCreate">false</enrichment>
    <enrichment key="opus.urn.autoCreate">true</enrichment>
    <licence>Optica Open Access Publishing Agreement</licence>
    <author>Christoph Zesch</author>
    <author>Daniel Finkelstein</author>
    <author>Martin Regehly</author>
    <author>Jürgen Reif</author>
    <author>Sigurd Schrader</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Gaussian beam</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>laser source</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Nd:YAG laser</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Raman laser</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>solid state laser</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>ultraviolet laser</value>
    </subject>
    <collection role="ddc" number="535">Licht, Infrarot- und Ultraviolettphänomene</collection>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="Import" number="import">Import</collection>
    <collection role="Funding" number="">Publikationsfonds der TH Wildau</collection>
    <collection role="green_open_access" number="1">Gold Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/2132/oe-34-4-6355.pdf</file>
  </doc>
  <doc>
    <id>1142</id>
    <completedYear>2019</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
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    <type>conferenceobject</type>
    <publisherName/>
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    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Endoscopic orientation by multimodal data fusion</title>
    <abstract language="eng">To improve the feasibility of endoscopic inspection processes we developed a system that provides online information about position, orientation and viewing direction of endoscopes, to support the analysis of endoscopic images and to ease the operational handling of the equipment. The setup is based on an industrial endoscope consisting of a camera, various MEMS and multimodal data fusion. The software contains algorithms for feature and geometric structure recognition as well as Kalman filters. To track the distal end of the endoscope and to generate 3D point cloud data in real time the optical and photometrical characteristics of the system are registered and the movement of the endoscope is reconstructed by using image processing techniques.</abstract>
    <parentTitle language="eng">Proc. SPIE 10931, MOEMS and Miniaturized Systems XVIII</parentTitle>
    <identifier type="issn">1996-756X</identifier>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-11420</identifier>
    <enrichment key="CopyrightInfo">Copyright 2019 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.</enrichment>
    <enrichment key="SourceTitle">Silvio Pulwer, Richard Fiebelkorn, Christoph Zesch, Patrick Steglich, Claus Villringer, Franccesco Villasmunta, Egbert M. Gedat, Jan Handrich, Sigurd Schrader, and Ralf Vandenhouten "Endoscopic orientation by multimodal data fusion", Proc. SPIE 10931, MOEMS and Miniaturized Systems XVIII, 1093114 (4 March 2019); doi: 10.1117/12.2508470; https://doi.org/10.1117/12.2508470</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.2508470</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Silvio Pulwer</author>
    <author>Richard Fiebelkorn</author>
    <author>Christoph Zesch</author>
    <author>Patrick Steglich</author>
    <author>Claus Villringer</author>
    <author>Francesco Villasmunta</author>
    <author>Egbert Gedat</author>
    <author>Jan Handrich</author>
    <author>Sigurd Schrader</author>
    <author>Ralf Vandenhouten</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>endoscope</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>orientation</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Kalman filter</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>visual odometry</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>mems</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>gyroscope</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>accelerometer</value>
    </subject>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1142/1093114.pdf</file>
  </doc>
  <doc>
    <id>1535</id>
    <completedYear>2019</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>114</pageFirst>
    <pageLast>119</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>SPIE</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Raman lasers for trace gas detection</title>
    <abstract language="eng">The emission of commercial solid-state lasers is shifted by Raman lasers to selected wavelengths suitable for trace gas detection. High power Raman lasers based on Ba(NO3)2, diamond and silicon detect CO2, O3 and H2O. Raman lasers base on the physical effect of stimulated Raman scattering. Two new Raman crystals (Spodumene and LuAlO3) are investigated and their SRS-spectra is shown.</abstract>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-15351</identifier>
    <enrichment key="opus.import.date">2021-09-17T11:15:00+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">sword</enrichment>
    <enrichment key="opus.import.file">filename=php4alDvx</enrichment>
    <enrichment key="opus.import.checksum">63c7a4bd3063b7930b352ca1426f16bd</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.2522463</enrichment>
    <enrichment key="CopyrightInfo">Copyright 2019 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.</enrichment>
    <enrichment key="SourceTitle">Christoph Zesch, Sigurd Schrader, Paolo Prosposito, Oliver Lux, and Hans J. Eichler "Raman lasers for trace gas detection", Proc. SPIE 11042, XXII International Symposium on High Power Laser Systems and Applications, 110420M (3 January 2019); https://doi.org/10.1117/12.2522463</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Christoph Zesch</author>
    <author>Sigurd Schrader</author>
    <author>Paolo Prosposito</author>
    <author>Oliver Lux</author>
    <author>Hans J. Eichler</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>stimulated Raman scattering</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Raman laser</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Barium nitrate</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Nd:YAG laser</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>trace gas detection</value>
    </subject>
    <collection role="ddc" number="620">Ingenieurwissenschaften und zugeordnete Tätigkeiten</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="Import" number="import">Import</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1535/110420M.pdf</file>
  </doc>
  <doc>
    <id>2082</id>
    <completedYear>2026</completedYear>
    <publishedYear>2025</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue>2</issue>
    <volume>32</volume>
    <type>article</type>
    <publisherName>IEEE</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Monolithically Integrated Optical Through-Silicon Waveguides for 3D Chip-to-Chip Photonic Interconnects</title>
    <abstract language="eng">The scaling limitations of electrical interconnects are driving the demand for efficient optical chip-to-chip links. We report the first monolithic integration of air-clad optical through-silicon waveguides in silicon, fabricated via Bosch and cryogenic deep reactive-ion etching. Rib, single-bridge, and double-bridge designs with 50 μm cores and up to 150 μm propagation lengths have been evaluated. Cryogenic-etched rib waveguides achieve the highest median transmission (66%, −1.80 dB), compared to Bosch-etched ribs (62%, −2.08 dB). Across all geometries, 3 dB alignment windows range from 9.3 μm to 49.2 μm, with Bosch-etched double-bridge waveguides providing the broadest tolerance. We show that geometric fidelity outweighs sidewall roughness for transmission and alignment in these large-core, multimode optical through-silicon waveguides. This technology provides a scalable, complementary metal-oxide semiconductor-compatible pathway toward 3D photonic interconnects.</abstract>
    <parentTitle language="eng">IEEE Journal of Selected Topics in Quantum Electronics</parentTitle>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-20828</identifier>
    <enrichment key="opus.import.date">2025-09-29T08:03:00+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">sword</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1109/JSTQE.2025.3615001</enrichment>
    <enrichment key="SourceTitle">Villasmunta, F., Heise, P., Breiter, M., Schrader, S., Schenk, H., Regehly, M., &amp; Mai, A. (2025). Monolithically Integrated Optical Through-Silicon Waveguides for 3D Chip-to-Chip Photonic Interconnects. IEEE Journal of Selected Topics in Quantum Electronics, 32(2), 3700215. doi:10.1109/JSTQE.2025.3615001</enrichment>
    <licence>Creative Commons - CC BY - Namensnennung 4.0 International</licence>
    <author>Francesco Villasmunta</author>
    <author>Patrick Heise</author>
    <author>Manuela Breiter</author>
    <author>Sigurd Schrader</author>
    <author>Harald Schenk</author>
    <author>Martin Regehly</author>
    <author>Andreas Mai</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>optical waveguide</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>optical device fabrication</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>silicon</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>three-dimensional display</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>optical loss</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>optical interconnection</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>coupling</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>optical surface wave</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>optical coupling</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>coupler</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>silicon photonics</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>three-dimensional integrated circuit</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>through-silicon vias (TSV)</value>
    </subject>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="Import" number="import">Import</collection>
    <collection role="green_open_access" number="4">Hybrid Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/2082/2082.pdf</file>
  </doc>
  <doc>
    <id>1388</id>
    <completedYear>2021</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue>2</issue>
    <volume>3</volume>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Silicon-organic hybrid photonics: an overview of recent advances, electro-optical effects and CMOS integration concepts</title>
    <abstract language="eng">In recent decades, much research effort has been invested in the development of photonic integrated circuits, and silicon-on-insulator technology has been established as a reliable platform for highly scalable silicon-based electro-optical modulators. However, the performance of such devices is restricted by the inherent material properties of silicon. An approach to overcoming these deficiencies is to integrate organic materials with exceptionally high optical nonlinearities into a silicon-on-insulator photonic platform. Silicon–organic hybrid photonics has been shown to overcome the drawbacks of silicon-based modulators in terms of operating speed, bandwidth, and energy consumption. This work reviews recent advances in silicon–organic hybrid photonics and covers the latest improvements to single components and device concepts. Special emphasis is given to the in-device performance of novel electro-optical polymers and the use of different electro-optical effects, such as the linear and quadratic electro-optical effect, as well as the electric-field-induced linear electro-optical effect. Finally, the inherent challenges of implementing non-linear optical polymers on a silicon photonic platform are discussed and a perspective for future directions is given.</abstract>
    <parentTitle language="eng">Journal of Physics: Photonics</parentTitle>
    <identifier type="issn">2515-7647</identifier>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-13882</identifier>
    <enrichment key="opus.import.date">2021-04-07T07:13:01+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">sword</enrichment>
    <enrichment key="opus.import.file">filename=phpVyKHrO</enrichment>
    <enrichment key="opus.import.checksum">771b29513d6504f20e045f4cf7af0810</enrichment>
    <enrichment key="SourceTitle">Patrick Steglich et al 2021 J. Phys. Photonics 3 022009</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1088/2515-7647/abd7cf</enrichment>
    <licence>Creative Commons - CC BY - Namensnennung 4.0 International</licence>
    <author>Patrick Steglich</author>
    <author>Christian Mai</author>
    <author>Claus Villringer</author>
    <author>Birgit Dietzel</author>
    <author>Siegfried Bondarenko</author>
    <author>Viachaslau Ksianzou</author>
    <author>Francesco Villasmunta</author>
    <author>Christoph Zesch</author>
    <author>Silvio Pulwer</author>
    <author>Martin Burger</author>
    <author>Joachim Bauer</author>
    <author>Friedhelm Heinrich</author>
    <author>Sigurd Schrader</author>
    <author>Francesco Vitale</author>
    <author>Fabio De Matteis</author>
    <author>Paolo Prosposito</author>
    <author>Mauro Casalboni</author>
    <author>Andreas Mai</author>
    <collection role="ddc" number="620">Ingenieurwissenschaften und zugeordnete Tätigkeiten</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="Import" number="import">Import</collection>
    <collection role="green_open_access" number="1">Gold Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1388/Steglich_2021_J._Phys._Photonics_3_022009.pdf</file>
  </doc>
  <doc>
    <id>1975</id>
    <completedYear>2024</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>12892</volume>
    <type>conferenceobject</type>
    <publisherName>Society of Photo-Optical Instrumentation Engineers (SPIE)</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Design, fabrication, and characterization of integrated optical through-silicon waveguides for 3D photonic interconnections</title>
    <abstract language="eng">In the context of an ever-growing volume of data generated by established and emerging technologies, such as 5G, the Internet of Things, artificial intelligence, machine learning, blockchain, and virtual reality, faster communication speed is demanded by data centers and high-performance computing. Transceiver requirements surged from 100 to 400 Gb/s and beyond. In this scenario, photonics aims to enable Tb/s optical communication at energies below 1 pJ/bit. Targeting higher communication rates while maintaining a low power budget can significantly benefit from 3D photonic chip architectures. This paper presents the simulation-based design, fabrication, and characterization of a monolithically integrated optical through-silicon waveguide that facilitates the connection between different surfaces of a silicon chip. Deep reactive ion etching was employed in both the Bosch and Cryogenic variants to evaluate the effect of sidewall roughness on propagation losses. The mechanical stability of the waveguide was ensured by interrupting the annular trench with a bridging structure. The high-refractive-index contrast to air provides tight light confinement for a core size of up to 50 μm and multimode operation at 1550 nm. The morphology was characterized using scanning electron microscopy (SEM), and optical transmission characterization was performed using relative power loss measurements. A tunable laser source was buttcoupled to a waveguide to analyze light transmission efficiency. Preliminary measurements using single-mode fiber show that the transmitted values exceeded 99% for all structures.</abstract>
    <parentTitle language="eng">Optical Interconnects XXIV</parentTitle>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-19759</identifier>
    <enrichment key="opus.import.date">2024-12-20T06:38:04+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">sword</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.3003146</enrichment>
    <enrichment key="SourceTitle">Francesco Villasmunta, Patrick Steglich, Claus Villringer, Sigurd Schrader, Harald Schenk, Andreas Mai, and Martin Regehly "Design, fabrication, and characterization of integrated optical through-silicon waveguides for 3D photonic interconnections", Proc. SPIE 12892, Optical Interconnects XXIV, 128920I (11 March 2024); https://doi.org/10.1117/12.3003146</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Francesco Villasmunta</author>
    <author>Patrick Steglich</author>
    <author>Claus Villringer</author>
    <author>Sigurd Schrader</author>
    <author>Harald Schenk</author>
    <author>Andreas Mai</author>
    <author>Martin Regehly</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>multimode photonics</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>cryogenic etching</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>ICP-DRIE</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>optical interconnects</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>silicon photonics</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>3D chip stacking</value>
    </subject>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="Import" number="import">Import</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1975/128920I.pdf</file>
  </doc>
  <doc>
    <id>1609</id>
    <completedYear>2019</completedYear>
    <publishedYear>2019</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue>6</issue>
    <volume>37</volume>
    <type>article</type>
    <publisherName>American Vacuum Society (AVS)</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Spectroscopic reflectometry for characterization of Through Silicon Via profile of Bosch etching process</title>
    <abstract language="eng">Through Silicon Via (TSV) technology is a key in 3D integration of circuits by the creation of interconnects using vias, which go through the full silicon wafer. Typically, a highly-selective Bosch Si etch process is used. It is characterized by a high etch rate at a high aspect ratio, whereby scallops on the sidewalls are generated. In this work, square via arrays with dimensions from 3 to 50 μm and up to 300 μm depth were fabricated and analyzed by spectroscopic reflectometry. The reflectometric data are compared to simulations by a novel theoretical approach. In order to simulate the reflectance spectra of TSV arrays, a combination of 2D and 3D rigorous coupled wave analysis was applied. Besides the via depth, the sidewall angle and the corner radius of the bottom profile were considered in the model. The general requirements on spectral resolution in TSV metrology are discussed.</abstract>
    <parentTitle language="eng">Journal of Vacuum Science &amp; Technology B</parentTitle>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-16093</identifier>
    <enrichment key="opus.import.date">2022-05-11T08:05:04+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">sword</enrichment>
    <enrichment key="opus.import.file">filename=phpbjGea3</enrichment>
    <enrichment key="opus.import.checksum">a56d1a9f91629a6169626ca95ba2cd89</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1116/1.5120617</enrichment>
    <enrichment key="CopyrightInfo">This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in "Joachim Bauer, Oksana Fursenko, Steffen Marschmeyer, Friedhelm Heinrich, Francesco Villasmunta, Claus Villringer, Christoph Zesch, and Sigurd Schrader , "Spectroscopic reflectometry for characterization of Through Silicon Via profile of Bosch etching process", Journal of Vacuum Science &amp; Technology B 37, 062205 (2019)" and may be found at https://doi.org/10.1116/1.5120617.</enrichment>
    <enrichment key="SourceTitle">Joachim Bauer, Oksana Fursenko, Steffen Marschmeyer, Friedhelm Heinrich, Francesco Villasmunta, Claus Villringer, Christoph Zesch, and Sigurd Schrader , "Spectroscopic reflectometry for characterization of Through Silicon Via profile of Bosch etching process", Journal of Vacuum Science &amp; Technology B 37, 062205 (2019) https://doi.org/10.1116/1.5120617</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Joachim Bauer</author>
    <author>Oksana Fursenko</author>
    <author>Steffen Marschmeyer</author>
    <author>Friedhelm Heinrich</author>
    <author>Francesco Villasmunta</author>
    <author>Claus Villringer</author>
    <author>Christoph Zesch</author>
    <author>Sigurd Schrader</author>
    <collection role="ddc" number="620">Ingenieurwissenschaften und zugeordnete Tätigkeiten</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="Import" number="import">Import</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1609/JVST_B37_062205.pdf</file>
  </doc>
  <doc>
    <id>942</id>
    <completedYear>2017</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>deu</language>
    <pageFirst>55</pageFirst>
    <pageLast>59</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>21</volume>
    <type>articlewildau</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="deu">Chip-integrierte photonische Bauelemente</title>
    <abstract language="deu">In unserer hochtechnologisierten Gesellschaft spielt die optische Datenübertragung aufgrund der stetig wachsenden Informationsvielfalt eine immer bedeutendere Rolle. In den Anfängen der Nachrichtentechnik waren Datenraten von wenigen bit/s realisierbar. Heute werden mittels optischer Technologien Übertragungsraten von mehreren Gbit/s umgesetzt. Möglich wird dies durch neue Entwicklungen in der Chip-integrierten Photonik. Beispiele dafür sind Chip-integrierte elektrooptische Modulatoren und Schalter. In diesem Artikel werden neue Entwicklungen in der Chip-integrierten Photonik diskutiert und die experimentelle Charakterisierung der Bauelemente in Form eines Ringresonators beschrieben. Für die Experimente wird exemplarisch ein photonisches Bauelement genutzt, das aus einem hybriden Silizium-Polymer-Materialsystem besteht. Die Ergebnisse zeigen, dass diese Materialkombination vielversprechend für zukünftige Chip-integrierte photonische Bauelemente mit extrem geringem Energiebedarf ist.</abstract>
    <abstract language="eng">The focus on high-tech in our society makes optical data transmission increasingly important due to the continually growing diversity of information. At the very beginning of integrated photonics, the data rates achieved were only a few bit/s. Today, transfer rates of several Gbit/s are possible due to novel chip-integrated devices such as electro-optical modulators and switches. This trend was made possible due to new developments in the field of Chip-integrated photonics. In this article, we discuss latest developments in the field of chip-integrated photonic devices and describe their experimental characterization. The experimental setup is developed and described in detail. The example used in our experiments is a hybrid silicon-polymer material system. Our results show that the hybrid material approach is a promising candidate for future on-chip integrated photonic devices with low power consumption.</abstract>
    <parentTitle language="deu">Wissenschaftliche Beiträge 2017</parentTitle>
    <identifier type="issn">0949-8214</identifier>
    <identifier type="doi">10.15771/0949-8214_2017_7</identifier>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-9426</identifier>
    <enrichment key="ZSTiteliD">16238</enrichment>
    <enrichment key="DataCiteUrl">https://commons.datacite.org/doi.org/10.15771/0949-8214_2017_7</enrichment>
    <licence>Creative Commons - CC BY-NC-ND 3.0 DE - Namensnennung - Nicht-kommerziell - Keine Bearbeitung 3.0 Deutschland</licence>
    <author>Patrick Steglich</author>
    <author>Claus Villringer</author>
    <author>Silvio Pulwer</author>
    <author>Birgit Dietzel</author>
    <author>Viachaslau Ksianzou</author>
    <author>Sigurd Schrader</author>
    <collection role="ddc" number="535">Licht, Infrarot- und Ultraviolettphänomene</collection>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="Publikationen_der_TH_Wildau" number="">Wissenschaftliche Beiträge</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="green_open_access" number="3">Diamond Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/942/0949-8214_2017_7.pdf</file>
  </doc>
  <doc>
    <id>1024</id>
    <completedYear>2018</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>deu</language>
    <pageFirst>31</pageFirst>
    <pageLast>38</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>22</volume>
    <type>articlewildau</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="deu">Theorie der Modenlinienspektroskopie zur optischen Charakterisierung von Polymerschichten</title>
    <abstract language="deu">Die Modenlinienspektroskopie kann zur hochpräzisen Charakterisierung von Polymerschichten bezüglich des Brechungsindex verwendet werden. Das vorliegende Manuskript behandelt die Theorie der Modenlinienspektroskopie und beginnt dabei mit den theoretischen Grundlagen eines planaren Wellenleiters, die zum Verständnis der Modenlinienspektroskopie notwendig sind. Die hier präsentierten expliziten Herleitungen können genutzt werden, um die Modenlinienspektroskopie so zu modifizieren, dass auch die Messung des Pockelseffektes möglich ist. Eine Anwendungsmöglichkeit soll in der zukünftigen Bestimmung des Pockelskoeffizienten bestehen, der für die Weiterentwicklung von polymerbasierten elektrooptischen Modulatoren benötigt wird. Zudem werden der Aufbau und die experimentelle Herangehensweisen beschrieben und die Brechungsindexbestimmung wird exemplarisch am Beispiel einer Wirt-Gast-Polymerschicht demonstriert.</abstract>
    <abstract language="eng">M-Line spectroscopy can be used for high precision measurements of polymer layers. The present manuscript deals with the theory of m-line spectroscopy and thus begins with the theoretical background of a planar waveguide structure, which is necessary for a deeper understanding of m-line spectroscopy. The explicit derivations presented here can be used to modify the m-line spectroscopy in such a way that the measurement of the Pockels effect is also possible. One application is to be obtained in the future configuration of the Pockels coefficients, which is needed to optimize electro-optical modulators. In addition, the set-up and the experimental approach are described. Finally, a host-guest polymer layer is experimentally characterized in terms of the refractive index.</abstract>
    <parentTitle language="deu">Wissenschaftliche Beiträge 2018</parentTitle>
    <identifier type="doi">10.15771/0949-8214_2018_4</identifier>
    <identifier type="issn">0949-8214</identifier>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-10248</identifier>
    <enrichment key="ZSTiteliD">16238</enrichment>
    <enrichment key="DataCiteUrl">https://commons.datacite.org/doi.org/10.15771/0949-8214_2018_4</enrichment>
    <licence>Creative Commons - CC BY-NC-ND - Namensnennung - Nicht kommerziell - Keine Bearbeitungen 4.0 International</licence>
    <author>Patrick Steglich</author>
    <author>Viachaslau Ksianzou</author>
    <author>Claus Villringer</author>
    <author>Silvio Pulwer</author>
    <author>Sigurd Schrader</author>
    <collection role="ddc" number="535">Licht, Infrarot- und Ultraviolettphänomene</collection>
    <collection role="ddc" number="620">Ingenieurwissenschaften und zugeordnete Tätigkeiten</collection>
    <collection role="Publikationen_der_TH_Wildau" number="">Wissenschaftliche Beiträge</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="green_open_access" number="3">Diamond Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1024/THW_WissBeitr2018_04_Steglich_Modenlinienspektroskopie.pdf</file>
  </doc>
  <doc>
    <id>1214</id>
    <completedYear>2018</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue>15</issue>
    <volume>43</volume>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Quadratic electro-optic effect in silicon-organic hybrid slot-waveguides</title>
    <abstract language="eng">This Letter reports on the quadratic electro-optic effect of polymers, observed in a silicon slot-waveguide at low voltages. We demonstrate that in narrow slots, the electro-optic response with respect to refractive index change is strong enough for on-chip wavelength tuning and intensity modulation using voltages as low as 1 V. A silicon slot-waveguide embedded by a nonlinear optical polymer, consisting of the dye Disperse Red 1 in poly(methyl methacrylate), serves as the phase shifter in a racetrack ring resonator. As deduced from the experimental data, the third-order susceptibility of the utilized electro-optic polymer is about 2·10−19 m2/V2. The demonstrated low-voltage operation and inherently thermal stability show the potential for silicon-organic hybrid devices using the quadratic electro-optic effect.</abstract>
    <parentTitle language="eng">Optics Letters</parentTitle>
    <identifier type="issn">1539-4794</identifier>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-12148</identifier>
    <enrichment key="CopyrightInfo">© 2018 Optical Society of America. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modifications of the content of this paper are prohibited.</enrichment>
    <enrichment key="SourceTitle">Patrick Steglich, Christian Mai, Claus Villringer, Silvio Pulwer, Mauro Casalboni, Sigurd Schrader, and Andreas Mai, "Quadratic electro-optic effect in silicon-organic hybrid slot-waveguides," Opt. Lett. 43, 3598-3601 (2018)</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1364/OL.43.003598</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Patrick Steglich</author>
    <author>Christian Mai</author>
    <author>Claus Villringer</author>
    <author>Silvio Pulwer</author>
    <author>Mauro Casalboni</author>
    <author>Sigurd Schrader</author>
    <author>Andreas Mai</author>
    <collection role="ddc" number="535">Licht, Infrarot- und Ultraviolettphänomene</collection>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1214/AS6508168893071391532178246851_content_1.pdf</file>
  </doc>
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