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  <doc>
    <id>1531</id>
    <completedYear>2017</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>250</pageFirst>
    <pageLast>259</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>SPIE</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Development of graphene process control by industrial optical spectroscopy setup</title>
    <abstract language="eng">The successful integration of graphene into microelectronic devices depends strongly on the availability of fast and nondestructive characterization methods of graphene grown by CVD on large diameter production wafers [1-3] which are in the interest of the semiconductor industry. Here, a high-throughput optical metrology method for measuring the thickness and uniformity of large-area graphene sheets is demonstrated. The method is based on the combination of spectroscopic ellipsometry and normal incidence reflectometry in UV-Vis wavelength range (200-800 nm) with small light spots (~ 30 μm2) realized in wafer optical metrology tool. In the first step graphene layers were transferred on a SiO2/Si substrate in order to determine the optical constants of graphene by the combination of multi-angle ellipsometry and reflectometry. Then these data were used for the development of a process control recipe of CVD graphene on 200 mm Ge(100)/Si(100) wafers. The graphene layer quality was additionally monitored by Raman spectroscopy. Atomic force microscopy measurements were performed for micro topography evaluation. In consequence, a robust recipe for unambiguous thickness monitoring of all components of a multilayer film stack, including graphene, surface residuals or interface layer underneath graphene and surface roughness is developed. Optical monitoring of graphene thickness uniformity over a wafer has shown an excellent long term stability (s=0.004 nm) regardless of the growth of interfacial GeO2 and surface roughness. The sensitivity of the optical identification of graphene during microelectronic processing was evaluated.&#13;
&#13;
This optical metrology technique with combined data collection exhibit a fast and highly precise method allowing one an unambiguous detection of graphene after transferring as well as after the CVD deposition process on a Ge(100)/Si(100) wafer. This approach is well suited for industrial applications due to its repeatability and flexibility.</abstract>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-15319</identifier>
    <enrichment key="opus.import.date">2021-09-17T09:01:46+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">sword</enrichment>
    <enrichment key="opus.import.file">filename=phpeRhVnU</enrichment>
    <enrichment key="opus.import.checksum">1bf9e1f678a46b2cc89015aca46613b8</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.2269603</enrichment>
    <enrichment key="CopyrightInfo">Copyright 2017 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.</enrichment>
    <enrichment key="SourceTitle">O. Fursenko, M. Lukosius, G. Lupina, J. Bauer, C. Villringer, and A. Mai "Development of graphene process control by industrial optical spectroscopy setup", Proc. SPIE 10330, Modeling Aspects in Optical Metrology VI, 1033017 (26 June 2017); https://doi.org/10.1117/12.2269603</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Oksana Fursenko</author>
    <author>Mindaugas Lukosius</author>
    <author>G. Lupina</author>
    <author>Joachim Bauer</author>
    <author>Claus Villringer</author>
    <author>Andreas Mai</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>graphene</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>spectroscopic ellipsometry</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>optical constant</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>reflectometry</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>optical metrology</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>AFM</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Raman spectroscopy</value>
    </subject>
    <collection role="ddc" number="620">Ingenieurwissenschaften und zugeordnete Tätigkeiten</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="Import" number="import">Import</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1531/1033017.pdf</file>
  </doc>
  <doc>
    <id>1528</id>
    <completedYear>2016</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>920</pageFirst>
    <pageLast>928</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>Society of Photo-Optical Instrumentation Engineers (SPIE)</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Evaluation of Fabry-Perot polymer film sensors made using hard dielectric mirror deposition</title>
    <abstract language="eng">Fabry-Perot (FP) polymer film sensors offer high acoustic sensitivity, small element sizes, broadband frequency response and optical transmission to enable high resolution, backward mode photoacoustic (PA) imaging. Typical approaches to sensor fabrication involve the deposition of stacks of alternating dielectric materials to form interferometer mirrors, which are separated by a polymer spacer. If hygroscopic soft dielectric materials are used, a protective polymer layer is typically required. In this study, methods for the deposition of water-resistant, hard dielectric materials onto polymers were explored to improve the robustness and performance of the sensors. This involved the optimisation of the fabrication process, the optical and acoustic characterisation of the sensors, and a comparison of the frequency response with the output of an acoustic forward model. The mirrors, which were separated by a 20 μm Parylene spacer, consisted of eight double layers of Ta2O5 and SiO2 deposited onto polymer substrates using temperature-optimised electron vapour deposition. The free spectral range of the interferometer was 32 nm, its finesse FR = 91, and its visibility V = 0.72. The noise-equivalent pressure was 0.3 kPa (20 MHz bandwidth). The measured frequency response was found to be more resonant at 25 MHz compared to sensors with soft dielectric mirrors, which was also in good agreement with the output of a forward model of the sensor. The sensors were used in a PA scanner to acquire 3-D images in tissue phantoms.</abstract>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-15289</identifier>
    <enrichment key="opus.import.date">2021-09-17T08:12:16+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">sword</enrichment>
    <enrichment key="opus.import.file">filename=phpbMaL8B</enrichment>
    <enrichment key="opus.import.checksum">c2fbd63e94e53810af6993133d596b2c</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.2234698</enrichment>
    <enrichment key="CopyrightInfo">Copyright 2016 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.</enrichment>
    <enrichment key="SourceTitle">Jens Buchmann, Edward Zhang, Chris Scharfenorth, Bastian Spannekrebs, Claus Villringer, and Jan Laufer "Evaluation of Fabry-Perot polymer film sensors made using hard dielectric mirror deposition", Proc. SPIE 9708, Photons Plus Ultrasound: Imaging and Sensing 2016, 970856 (15 March 2016); https://doi.org/10.1117/12.2234698</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Jens Buchmann</author>
    <author>Edward Zhang</author>
    <author>Chris Scharfenorth</author>
    <author>Bastian Spannekrebs</author>
    <author>Claus Villringer</author>
    <author>Jan Laufer</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Fabry-Perot</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>ultrasound</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>photoacoustic</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>imaging</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>sensor</value>
    </subject>
    <collection role="ddc" number="620">Ingenieurwissenschaften und zugeordnete Tätigkeiten</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="Import" number="import">Import</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1528/970856.pdf</file>
  </doc>
  <doc>
    <id>1530</id>
    <completedYear>2016</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>51</pageFirst>
    <pageLast>56</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>SPIE</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Triangulation-based 3D surveying borescope</title>
    <abstract language="eng">In this work, a measurement concept based on triangulation was developed for borescopic 3D-surveying of surface defects. The integration of such measurement system into a borescope environment requires excellent space utilization. The triangulation angle, the projected pattern, the numerical apertures of the optical system, and the viewing angle were calculated using partial coherence imaging and geometric optical raytracing methods. Additionally, optical aberrations and defocus were considered by the integration of Zernike polynomial coefficients. The measurement system is able to measure objects with a size of 50 μm in all dimensions with an accuracy of ± 5 μm. To manage the issue of a low depth of field while using an optical high resolution system, a wavelength dependent aperture was integrated. Thereby, we are able to control depth of field and resolution of the optical system and can use the borescope in measurement mode with high resolution and low depth of field or in inspection mode with low resolution and higher depth of field. First measurements of a demonstrator system are in good agreement with our simulations.</abstract>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-15307</identifier>
    <enrichment key="opus.import.date">2021-09-17T08:47:18+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">sword</enrichment>
    <enrichment key="opus.import.file">filename=phpDjUR2J</enrichment>
    <enrichment key="opus.import.checksum">bfe2033b55e7dfd0ecc0475870d4f97e</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.2225203</enrichment>
    <enrichment key="CopyrightInfo">Copyright 2016 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.</enrichment>
    <enrichment key="SourceTitle">S. Pulwer, P. Steglich, C. Villringer, J. Bauer, M. Burger, M. Franz, K. Grieshober, F. Wirth, J. Blondeau, J. Rautenberg, S. Mouti, and S. Schrader "Triangulation-based 3D surveying borescope", Proc. SPIE 9890, Optical Micro- and Nanometrology VI, 989009 (26 April 2016); https://doi.org/10.1117/12.2225203</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Silvio Pulwer</author>
    <author>Patrick Steglich</author>
    <author>Claus Villringer</author>
    <author>Joachim Bauer</author>
    <author>Martin Burger</author>
    <author>M. Franz</author>
    <author>K. Grieshober</author>
    <author>F. Wirth</author>
    <author>J. Blondeau</author>
    <author>J. Rautenberg</author>
    <author>S. Mouti</author>
    <author>Sigurd Schrader</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>borescope</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>3D measurement</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>triangulation</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>lens design</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>calibration</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>defect</value>
    </subject>
    <collection role="ddc" number="620">Ingenieurwissenschaften und zugeordnete Tätigkeiten</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="Import" number="import">Import</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1530/989009.pdf</file>
  </doc>
  <doc>
    <id>1608</id>
    <completedYear>2019</completedYear>
    <publishedYear>2019</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue>6</issue>
    <volume>37</volume>
    <type>article</type>
    <publisherName>American Vacuum Society (AVS)</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Diagnostic of graphene on Ge(100)/Si(100) in a 200 mm wafer Si technology environment by spectroscopic ellipsometry/reflectometry</title>
    <abstract language="eng">Comprehensive diagnostics is a prerequisite for the application of graphene in semiconductor technologies. Here, the authors present long-term investigations of graphene on 200-mm Ge(100)/Si(100) wafers under clean room environmental conditions. Diagnostic of graphene was performed by a fast and nondestructive metrology method based on the combination of spectroscopic ellipsometry and reflectometry (SE/R), realized within a wafer optical metrology tool. A robust procedure for unambiguous thickness monitoring of a multilayer film stack, including graphene, interface layer GeOx underneath graphene, and surface roughness is developed and applied for process control. The authors found a relationship between the quality of graphene and the growth of GeOx beneath graphene. Enhanced oxidation of Ge beneath graphene was registered as a long-term process. SE/R measurements were validated and complemented using atomic force microscopy, scanning electron microscopy, Raman spectroscopy, and secondary ion mass spectrometry. This comparative study shows a high potential for optical metrology of graphene deposited on Ge/Si structures, due to its great sensitivity, repeatability, and flexibility, realized in a nondestructive way.</abstract>
    <parentTitle language="eng">Journal of Vacuum Science &amp; Technology B</parentTitle>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-16083</identifier>
    <enrichment key="opus.import.date">2022-05-11T08:04:30+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">sword</enrichment>
    <enrichment key="opus.import.file">filename=phphbjRZd</enrichment>
    <enrichment key="opus.import.checksum">0df6bbf8dfbf24e6f3913d10327d6343</enrichment>
    <enrichment key="SourceTitle">Oksana Fursenko, Mindaugas Lukosius, Joachim Bauer, Claus Villringer, Helge Lux, Florian Bärwolf, Marco Lisker, and Andreas Mai , "Diagnostic of graphene on Ge(100)/Si(100) in a 200 mm wafer Si technology environment by spectroscopic ellipsometry/reflectometry", Journal of Vacuum Science &amp; Technology B 37, 062927 (2019) https://doi.org/10.1116/1.5122792</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1116/1.5122792</enrichment>
    <enrichment key="CopyrightInfo">This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in "Oksana Fursenko, Mindaugas Lukosius, Joachim Bauer, Claus Villringer, Helge Lux, Florian Bärwolf, Marco Lisker, and Andreas Mai , "Diagnostic of graphene on Ge(100)/Si(100) in a 200 mm wafer Si technology environment by spectroscopic ellipsometry/reflectometry", Journal of Vacuum Science &amp; Technology B 37, 062927 (2019)" and may be found at https://doi.org/10.1116/1.5122792.</enrichment>
    <enrichment key="opus.doi.autoCreate">false</enrichment>
    <enrichment key="opus.urn.autoCreate">true</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Oksana Fursenko</author>
    <author>Mindaugas Lukosius</author>
    <author>Joachim Bauer</author>
    <author>Claus Villringer</author>
    <author>Helge Lux</author>
    <author>Florian Bärwolf</author>
    <author>Marco Lisker</author>
    <author>Andreas Mai</author>
    <collection role="ddc" number="620">Ingenieurwissenschaften und zugeordnete Tätigkeiten</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="Import" number="import">Import</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1608/JVST_B37_062927.pdf</file>
  </doc>
  <doc>
    <id>1536</id>
    <completedYear>2020</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>SPIE</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Dynamic pattern generation by singlemode fibers for endoscopic 3D measurement systems</title>
    <abstract language="eng">This work presents experimental and simulation results of a 3D measurement concept based on fiber-optic interference pattern generation. A demonstrator system which is able to adjust different optical and mechanical parameters is described. The results of parameter variation studies are discussed along with possible applications in the field of micro-optical 3D measurement systems like endoscopes. The experiments were prepared with different structures with various scattering properties. To implement that approach into a micro-optical 3D measurement system, the combination of distance variation between the fibers and a controlled phase shift introduced by a retarder can be used to design the system versatile.</abstract>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-15364</identifier>
    <enrichment key="opus.import.date">2021-09-17T11:24:54+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">sword</enrichment>
    <enrichment key="opus.import.file">filename=php3kHmfo</enrichment>
    <enrichment key="opus.import.checksum">1097951ba9d9464fa0628f3f6c593379</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.2543526</enrichment>
    <enrichment key="CopyrightInfo">Copyright 2020 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.</enrichment>
    <enrichment key="SourceTitle">Silvio Pulwer, Daniel Jahns, Claus Villringer, and Sigurd Schrader "Dynamic pattern generation by singlemode fibers for endoscopic 3D measurement systems", Proc. SPIE 11293, MOEMS and Miniaturized Systems XIX, 112930F (28 February 2020); https://doi.org/10.1117/12.2543526</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Silvio Pulwer</author>
    <author>Daniel Jahns</author>
    <author>Claus Villringer</author>
    <author>Sigurd Schrader</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>endoscope</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>3D measurement</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>phase shift</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>fiber</value>
    </subject>
    <collection role="ddc" number="620">Ingenieurwissenschaften und zugeordnete Tätigkeiten</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="Import" number="import">Import</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1536/112930F.pdf</file>
  </doc>
  <doc>
    <id>1533</id>
    <completedYear>2018</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>217</pageFirst>
    <pageLast>222</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>SPIE</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Parallelised photoacoustic signal acquisition using a Fabry-Perot sensor and a camera-based interrogation scheme</title>
    <abstract language="eng">Tomographic photoacoustic (PA) images acquired using a Fabry-Perot (FP) based scanner offer high resolution and image fidelity but can result in long acquisition times due to the need for raster scanning. To reduce the acquisition times, a parallelised camera-based PA signal detection scheme is developed. The scheme is based on using a sCMOScamera and FPI sensors with high homogeneity of optical thickness. PA signals were acquired using the camera-based setup and the signal to noise ratio (SNR) was measured. A comparison of the SNR of PA signal detected using 1) a photodiode in a conventional raster scanning detection scheme and 2) a sCMOS camera in parallelised detection scheme is made. The results show that the parallelised interrogation scheme has the potential to provide high speed PA imaging.</abstract>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-15335</identifier>
    <enrichment key="opus.import.date">2021-09-17T10:53:30+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">sword</enrichment>
    <enrichment key="opus.import.file">filename=phpfGvKAj</enrichment>
    <enrichment key="opus.import.checksum">2a8b53435a02c891ed1e82cc5b4020b7</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.2290223</enrichment>
    <enrichment key="CopyrightInfo">Copyright 2018 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.</enrichment>
    <enrichment key="SourceTitle">T. Saeb Gilani, C. Villringer, E. Zhang, H. Gundlach, J. Buchmann, S. Schrader, and J. Laufer "Parallelised photoacoustic signal acquisition using a Fabry-Perot sensor and a camera-based interrogation scheme", Proc. SPIE 10494, Photons Plus Ultrasound: Imaging and Sensing 2018, 1049431 (20 February 2018); https://doi.org/10.1117/12.2290223</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Taravat Saeb Gilani</author>
    <author>Claus Villringer</author>
    <author>Edward Zhang</author>
    <author>H. Gundlach</author>
    <author>Jens Buchmann</author>
    <author>Sigurd Schrader</author>
    <author>Jan Laufer</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>photoacoustic imaging</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>parallelised signal acquisition</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Fabry-Perot polymer film sensor</value>
    </subject>
    <collection role="ddc" number="620">Ingenieurwissenschaften und zugeordnete Tätigkeiten</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="Import" number="import">Import</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1533/1049431.pdf</file>
  </doc>
  <doc>
    <id>1784</id>
    <completedYear>2023</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>Society of Photo-Optical Instrumentation Engineers (SPIE)</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Plano-concave optical sensor for transcranial photoacoustic measurements</title>
    <abstract language="eng">Biomedical photoacoustics is usually used to image absorption-based contrast in soft tissues up to depths of several centimeters and with sub-millimeter resolution. By contrast, measuring Photoacoustic (PA) signals through hard bone tissue shows severe signal degradation due to aberration and high attenuation of high frequency acoustic signal components. This is particularly noticeable when measuring through thicker, human, skull bone. Which is the main reason why transcranial PA imaging in humans has so far proved challenging to implement. To tackle this challenge, we developed an optical resonator sensor based on a previous planar-concave design. This sensor was found to be highly suitable for measuring the low-pressure amplitude and low acoustic frequency signals that are transmitted through human cranial bone. A plano-concave optical resonator sensor was fabricated to provide high sensitivity in the acoustic frequency range of DC to around 2 MHz, a low noise equivalent pressure and a small active element size enabling it to significantly outperform conventional piezoelectric transducers when measuring PA waves transmitted through ex vivo human cranial bones.</abstract>
    <parentTitle language="eng">Opto-Acoustic Methods and Applications in Biophotonics VI</parentTitle>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-17840</identifier>
    <enrichment key="opus.import.data">@inproceedings10.1117/12.2675593, author = Thomas Kirchner and Claus Villringer and Marko Gutke and Jan Laufer, title = Plano-concave optical sensor for transcranial photoacoustic measurements, volume = 12631, booktitle = Opto-Acoustic Methods and Applications in Biophotonics VI, editor = Chulhong Kim and Jan Laufer and Vasilis Ntziachristos and Roger J. Zemp, organization = International Society for Optics and Photonics, publisher = SPIE, pages = 126310R, keywords = transcranial, ex vivo, human, brain, optical resonator, photoacoustic, optoacoustic, year = 2023, doi = 10.1117/12.2675593, URL = https://doi.org/10.1117/12.2675593</enrichment>
    <enrichment key="opus.import.dataHash">md5:42c833c771cb4bb77b0167fd11432b27</enrichment>
    <enrichment key="opus.import.date">2023-08-31T07:08:12+00:00</enrichment>
    <enrichment key="opus.import.file">/tmp/phpf009Ji</enrichment>
    <enrichment key="opus.import.format">bibtex</enrichment>
    <enrichment key="opus.import.id">64f03c5c21e578.46745999</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.2675593</enrichment>
    <enrichment key="SourceTitle">Thomas Kirchner, Claus Villringer, Marko Gutke, and Jan Laufer "Plano-concave optical sensor for transcranial photoacoustic measurements", Proc. SPIE 12631, Opto-Acoustic Methods and Applications in Biophotonics VI, 126310R (11 August 2023). DOI: https://doi.org/10.1117/12.2675593</enrichment>
    <enrichment key="CopyrightInfo">Copyright 2023 Society of Photo‑Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited.</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Thomas Kirchner</author>
    <author>Claus Villringer</author>
    <author>Marko Gutke</author>
    <author>Jan Laufer</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>transcranial</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>ex vivo</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>human</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>brain</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>optical resonator</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>photoacoustic</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>optoacoustic</value>
    </subject>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1784/126310R.pdf</file>
  </doc>
  <doc>
    <id>1785</id>
    <completedYear>2023</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Photoacoustic tomography using a Fabry-Perot sensor with homogeneous optical thickness and wide-field camera-based detection</title>
    <abstract language="eng">Fabry-Perot (FP) sensors are typically read out using a raster scan to acquire tomographic Photoacoustic (PA) images. To speed up the recording time, wide-field illumination of the sensor in combination with a camera as detector can be used. In this study, an sCMOS camera and wavelengths around 517 nm are used to interrogate a FP sensor with a homogeneous optical thickness over a 4 cm2 aperture. The recorded time series show PA signals are acquired over the entire area of the interrogation beam. The performance of the system, such as the noise equivalent pressure, is evaluated.</abstract>
    <parentTitle language="eng">Opto-Acoustic Methods and Applications in Biophotonics VI</parentTitle>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-17850</identifier>
    <enrichment key="opus.import.data">@inproceedings10.1117/12.2675590, author = Jan Sievers and Claus Villringer and Werner Lebek and Taravat Gilani and Jan Laufer, title = Photoacoustic tomography using a Fabry-Perot sensor with homogeneous optical thickness and wide-field camera-based detection, volume = 12631, booktitle = Opto-Acoustic Methods and Applications in Biophotonics VI, editor = Chulhong Kim and Jan Laufer and Vasilis Ntziachristos and Roger J. Zemp, organization = International Society for Optics and Photonics, publisher = SPIE, pages = 126310P, keywords = Photoacoustic tomograph, Fabry-Perot sensor, camera-based setup, photopolymer, polyvinyl cinnamate, interferometer transfer function, acoustic sensitivity, detection aperture, year = 2023, doi = 10.1117/12.2675590, URL = https://doi.org/10.1117/12.2675590</enrichment>
    <enrichment key="opus.import.dataHash">md5:9d7f166fa209432ec45f7bbb963c8e2e</enrichment>
    <enrichment key="opus.import.date">2023-08-31T07:32:30+00:00</enrichment>
    <enrichment key="opus.import.file">/tmp/php5TM3xe</enrichment>
    <enrichment key="opus.import.format">bibtex</enrichment>
    <enrichment key="opus.import.id">64f0420eef7d04.95020778</enrichment>
    <enrichment key="CopyrightInfo">Copyright 2023 Society of Photo‑Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited.</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.2675590</enrichment>
    <enrichment key="SourceTitle">Jan Sievers, Claus Villringer, Werner Lebek, Taravat Gilani, and Jan Laufer "Photoacoustic tomography using a Fabry-Perot sensor with homogeneous optical thickness and wide-field camera-based detection", Proc. SPIE 12631, Opto-Acoustic Methods and Applications in Biophotonics VI, 126310P (11 August 2023). DOI: https://doi.org/10.1117/12.2675590</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Jan Sievers</author>
    <author>Claus Villringer</author>
    <author>Werner Lebek</author>
    <author>Taravat Saeb Gilani</author>
    <author>Jan Laufer</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>photoacoustic tomograph</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Fabry-Perot sensor</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>camera-based setup</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>photopolymer</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>polyvinyl cinnamate</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>interferometer transfer function</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>acoustic sensitivity</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>detection aperture</value>
    </subject>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1785/126310P.pdf</file>
  </doc>
  <doc>
    <id>1786</id>
    <completedYear>2023</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Evaluation of fabrication methods for Fabry-Perot polymer film ultrasound sensors</title>
    <abstract language="eng">Fabry-Pèrot (FP) interferometer sensors enable highly sensitive backward mode acoustic detection in Photoacoustic (PA) imaging. They are transparent to the excitation wavelength, can be placed directly next to the PA source, and offer a broadband frequency response and high acoustic sensitivity. PA tomography using parallelized detection requires high spatial uniformity of the optical and acoustic properties, which can be hampered by contaminations during fabrication that lead to the formation of inhomogeneities and artefacts. The quality and homogeneity of the dielectric and polymer layers have a direct effect on the maximum optical phase sensitivity, and hence acoustic sensitivity. In this study, cross-sectional images of FP sensors were obtained using focused ion beam milling and ultramicrotomy followed by Scanning Electron Microscopy (SEM) and Transmission Electron Microscopy (TEM) to evaluate different fabrication methods.</abstract>
    <parentTitle language="eng">Opto-Acoustic Methods and Applications in Biophotonics VI</parentTitle>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-17864</identifier>
    <enrichment key="opus.import.data">@inproceedings10.1117/12.2675592, author = Werner Lebek and Frank Heyroth and Frank Syrowatka and Claus Villringer and Sylvia Goerlitz and Jan Laufer, title = Evaluation of fabrication methods for Fabry-Perot polymer film ultrasound sensors, volume = 12631, booktitle = Opto-Acoustic Methods and Applications in Biophotonics VI, editor = Chulhong Kim and Jan Laufer and Vasilis Ntziachristos and Roger J. Zemp, organization = International Society for Optics and Photonics, publisher = SPIE, pages = 126310Y, keywords = Photoacoustic imaging, Fabry-Perót sensor, Parylene-C, Focus ion beam, Electron microscopy, year = 2023, doi = 10.1117/12.2675592, URL = https://doi.org/10.1117/12.2675592</enrichment>
    <enrichment key="opus.import.dataHash">md5:8b04f22215e9baf42477b6dfa4ebbf5b</enrichment>
    <enrichment key="opus.import.date">2023-08-31T07:45:51+00:00</enrichment>
    <enrichment key="opus.import.file">/tmp/phppGhzZx</enrichment>
    <enrichment key="opus.import.format">bibtex</enrichment>
    <enrichment key="opus.import.id">64f0452f2eba79.83547920</enrichment>
    <enrichment key="CopyrightInfo">Copyright 2023 Society of Photo‑Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited.</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.2675592</enrichment>
    <enrichment key="SourceTitle">Werner Lebek, Frank Heyroth, Frank Syrowatka, Claus Villringer, Sylvia Goerlitz, and Jan Laufer "Evaluation of fabrication methods for Fabry-Perot polymer film ultrasound sensors", Proc. SPIE 12631, Opto-Acoustic Methods and Applications in Biophotonics VI, 126310Y (11 August 2023). DOI: https://doi.org/10.1117/12.2675592</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Werner Lebek</author>
    <author>Frank Heyroth</author>
    <author>Frank Syrowatka</author>
    <author>Claus Villringer</author>
    <author>Sylvia Goerlitz</author>
    <author>Jan Laufer</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>photoacoustic imaging</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Fabry-Perot sensor</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>parylene-C</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>cocus ion beam</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>electron microscopy</value>
    </subject>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1786/126310Y.pdf</file>
  </doc>
  <doc>
    <id>1376</id>
    <completedYear>2019</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>Society of Photo-Optical Instrumentation Engineers (SPIE)</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Development of tuneable Fabry-Pérot sensors for parallelised photoacoustic signal acquisition</title>
    <abstract language="eng">Fabry-Pérot (FP) sensors have enabled high resolution 3D photoacoustic (PA) imaging in backward mode. However, raster-scanning of the interrogation laser beam across the sensor can result in slow 3D image acquisition. To overcome this limitation, parallelized PA signal acquisition can be used for which FP sensors with uniform optical thickness are required. In this work, the optical thickness is tuned a) irreversibly through the use of a photopolymer host matrix and b) actively using embedded electro-optic (EO) chromophores. Polymer spacers (5 μm) were deposited using spin coating and sandwiched between two dielectric mirrors and transparent ITO electrodes. The employed polymer guest-host system consists of an EO chromophore (2-methyl-4-nitroaniline) and poly(vinyl cinnamate). EO tuneability was induced using contact poling and a tuneability of 68 pm was demonstrated. The optical thickness was homogenised by raster scanning a UV beam whilst varying the exposure time across a 4 mm2 detection aperture.</abstract>
    <parentTitle language="eng">Proc. SPIE 10878, Photons Plus Ultrasound: Imaging and Sensing 2019, 108780M (8 March 2019)</parentTitle>
    <identifier type="issn">1996-756X</identifier>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-13769</identifier>
    <enrichment key="opus.source">publish</enrichment>
    <enrichment key="CopyrightInfo">Copyright (2019) Society of Photo‑Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited.</enrichment>
    <enrichment key="SourceTitle">Claus Villringer, Taravat S. Gilani, Edward Zhang, Silvio Pulwer, Patrick Steglich, Sigurd Schrader, and Jan Laufer "Development of tuneable Fabry-Pérot sensors for parallelised photoacoustic signal acquisition", Proc. SPIE 10878, Photons Plus Ultrasound: Imaging and Sensing 2019, 108780M (8 March 2019); https://doi.org/10.1117/12.2509437</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.2509437</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Claus Villringer</author>
    <author>Taravat Saeb Gilani</author>
    <author>Edward Zhang</author>
    <author>Silvio Pulwer</author>
    <author>Patrick Steglich</author>
    <author>Sigurd Schrader</author>
    <author>Jan Laufer</author>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1376/108780M.pdf</file>
  </doc>
</export-example>
