<?xml version="1.0" encoding="utf-8"?>
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  <doc>
    <id>1392</id>
    <completedYear>2021</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">A monolithically integrated micro fluidic channel in a silicon-based photonic-integrated-circuit technology for biochemical sensing</title>
    <abstract language="eng">In this work, a cost-effective optofluidic system is propossed and preliminary experimental results are presented. A microfluidic channel monolithically integrated into a photonic integrated circuit technology is used in conjunc- tion with a cyclo-olefin copolymer (COC) substrate to provide fluidic in- and output ports. We report on initial experimental results as well as on the simple and cost-effective fabrication of this optofluidic system by means of micro-milling.</abstract>
    <parentTitle language="eng">Proc. SPIE 11772, Optical Sensors 2021</parentTitle>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-13925</identifier>
    <enrichment key="opus.source">publish</enrichment>
    <enrichment key="CopyrightInfo">Copyright 2021 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.</enrichment>
    <enrichment key="SourceTitle">Patrick Steglich, Martin Paul, Christian Mai, Andrea Böhme, Siegfried Bondarenko, Michael G. Weller, and Andreas Mai "A monolithically integrated micro fluidic channel in a silicon-based photonic-integrated-circuit technology for biochemical sensing", Proc. SPIE 11772, Optical Sensors 2021, 1177206 (18 April 2021); https://doi.org/10.1117/12.2588791</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.2588791</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Patrick Steglich</author>
    <author>Martin Paul</author>
    <author>Christian Mai</author>
    <author>Andrea Böhme</author>
    <author>Siegfried Bondarenko</author>
    <author>Michael G. Weller</author>
    <author>Andreas Mai</author>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1392/1177206.pdf</file>
  </doc>
</export-example>
